Bulletin of the American Physical Society
65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012; Austin, Texas
Session ET4: Ion Distribution Functions
1:30 PM–3:00 PM,
Tuesday, October 23, 2012
Room: Salon DE
Chair: Svetlana Radovanov, Varian Semiconductor Equipment Associates, Inc
Abstract ID: BAPS.2012.GEC.ET4.5
Abstract: ET4.00005 : Single and multi-point ion energy distributions in a VHF+RF commercial plasma reactor measured by novel in-wafer ion energy analyzer
2:45 PM–3:00 PM
Preview Abstract Abstract
Authors:
Barton Lane
(Tokyo Electron America)
Merritt Funk
(Tokyo Electron America)
Lee Chen
(Tokyo Electron America)
Radha Sundararajan
(Tokyo Electron America)
Jianping Zhao
(Tokyo Electron America)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2012.GEC.ET4.5
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