65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012;
Austin, Texas
Session Index
Session ET3: Inductively Coupled Plasmas
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Show Abstracts |
Chair: Steve Shannon, North Carolina State University
Room: Classroom 202
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Tuesday, October 23, 2012
1:30PM - 2:00PM
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ET3.00001: Ferromagnetic Enhanced Inductive Plasma Sources
Invited Speaker:
Valery Godyak
Preview Abstract |
Tuesday, October 23, 2012
2:00PM - 2:15PM
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ET3.00002: High Pressure Discharge Negative Ion Source
Lynn Olson, John Blandino, Nikolaos Gatsonis
Preview Abstract |
Tuesday, October 23, 2012
2:15PM - 2:30PM
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ET3.00003: Three-Dimensional Electromagnetic Plasma Modeling of Inductively Coupled Plasma Source and Antenna
Shahid Rauf, Ankur Agarwal, Jason Kenney, Ming-Feng Wu, Ken Collins
Preview Abstract |
Tuesday, October 23, 2012
2:30PM - 2:45PM
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ET3.00004: Evidence of weak plasma series resonance heating in the H-mode of neon and neon/argon inductively coupled plasmas
A.E. Wendt, John B. Boffard, R.O. Jung, Chun C. Lin, L.E. Aneskavich
Preview Abstract |
Tuesday, October 23, 2012
2:45PM - 3:00PM
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ET3.00005: Model of an Ar/O$_{2}$ inductive discharge used for plasma spray deposition
Claudia Lazzaroni, Mehrdad Nikravech, Pascal Chabert
Preview Abstract |
