65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012;
Austin, Texas
Session Index
Session DT4: Capacitively Coupled Plasmas
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Show Abstracts |
Chair: Pascal Chabert, Ecole Polytechnique - CNRS
Room: Salon DE
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Tuesday, October 23, 2012
10:00AM - 10:15AM
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DT4.00001: Plasma characteristics in non-sinusoidally excited CCP discharges
Trevor Lafleur, Jean-Paul Booth
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Tuesday, October 23, 2012
10:15AM - 10:30AM
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DT4.00002: Tailored Voltage Waveform Capacitively-Coupled Plasmas
Jean-Paul Booth, Trevor Lafleur, Pierre-Alexandre Delattre, Erik Johnson
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Tuesday, October 23, 2012
10:30AM - 10:45AM
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DT4.00003: A numerical analysis of plasma non-uniformity in the parallel plate VHF-CCP and the comparison among various model
Ikuo Sawada
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Tuesday, October 23, 2012
10:45AM - 11:00AM
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DT4.00004: Extension of CCP DC Self Bias Models To The Case of Fractional Diversion of Powered Electrode Current to Ground
D.L. Keil, E. Augustyniak, E. Dorai, F. Galli
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Tuesday, October 23, 2012
11:00AM - 11:15AM
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DT4.00005: Analysis of the phase controlled capacitively coupled plasma using triode circuit model
Myung-Sun Choi, Seok-Hwan Lee, Gon-Ho Kim, Dougyong Sung
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Tuesday, October 23, 2012
11:15AM - 11:30AM
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DT4.00006: The effect of the driving frequencies on the Electrical Asymmetry Effect in dual-frequency capacitive radio frequency plasmas
Julian Schulze, Ihor Korolov, Uwe Czarnetzki, Zoltan Donko
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Tuesday, October 23, 2012
11:30AM - 11:45AM
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DT4.00007: Electromagnetic Particle-in-Cell Simulation of Large Area High-Frequency Capacitive Coupled Plasmas for the Reduction of Standing Wave Effects
Jin Seok Kim, In Cheol Song, Seok Won Hwang, Ho-Jun Lee, Hae June Lee
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Tuesday, October 23, 2012
11:45AM - 12:00PM
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DT4.00008: Electric fields measurements in the collisional RF plasma pre-sheath during microgravity conditions
Job Beckers, Dirk Trienekens, Gerrit Kroesen
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