62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009;
Saratoga Springs, New York
Session Index
Session TR1: Materials Processing
Chair: Jean-Paul Booth, CNRS - Ecole Polytechnique
Room: Saratoga Hilton Ballroom 1
Thursday, October 22, 2009
1:30PM - 2:00PM
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TR1.00001: Reaction mechanisms in patterning complex oxide materials by plasmas
Invited Speaker:
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Thursday, October 22, 2009
2:00PM - 2:15PM
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TR1.00002: Surface Modification of Polymer Photoresists in Fluorocarbon Plasma Etching
Mingmei Wang, Mark Kushner
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Thursday, October 22, 2009
2:15PM - 2:30PM
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TR1.00003: Factors Affecting the Sealing Efficiency of Low-$k$ Dielectric Surface Pores Using Successive He and Ar/NH$_{3}$ Plasma Treatment
Juline Shoeb, Mark Kushner
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Thursday, October 22, 2009
2:30PM - 2:45PM
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TR1.00004: The influence of He plasma pretreatment on O and H atom interaction with low-k nanoporous materials
O.V. Braginsky, A.S. Kovalev, D.V. Lopaev, E.M. Malykhin, Yu. A. Mankelevich, T.V. Rakhimova, A.T. Rakhimov, A.N. Vasilieva, S.M. Zyryanov, M.R. Baklanov
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Thursday, October 22, 2009
2:45PM - 3:00PM
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TR1.00005: Investigation of the etching mechanisms of Ar/Cl$_{2}$/O$_{2}$ inductively coupled plasmas on silicon by means of modelling and experiments
Stefan Tinck
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Thursday, October 22, 2009
3:00PM - 3:30PM
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TR1.00006: Development and validation of a C5F8/Ar/O2 mixture chemistry model using quantum chemistry methods
Invited Speaker:
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Session TR2: Electron and Photon Interactions with Atoms and Molecules
Chair: Klaus Bartschat, Drake University
Room: Saratoga Hilton Ballroom 2
Thursday, October 22, 2009
1:30PM - 2:00PM
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TR2.00001: Laser--assisted electron impact autoionization of Helium
Invited Speaker:
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Thursday, October 22, 2009
2:00PM - 2:15PM
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TR2.00002: Super-elastic electron excitation of atoms in magnetic {\&} optical fields
Andrew Murray, William MacGillivray, Martyn Hussey
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Thursday, October 22, 2009
2:15PM - 2:30PM
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TR2.00003: (e,2e) ionization studies of diatomic {\&} triatomic molecules
Kate Nixon, Andrew Murray, Christian Kaiser, Ola Al-Hagan, James Colgan, Don Madison
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Thursday, October 22, 2009
2:30PM - 2:45PM
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TR2.00004: Electron Impact Ionization Cross Sections of H$_{2}$~for Low Excess Energies Ranging from 2eV to 20eV
Ola Al-Hagan, Don Madison, James Colgan, Christian Kaiser, Andrew Murray
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Thursday, October 22, 2009
2:45PM - 3:00PM
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TR2.00005: Accuracy of the Gamow Factor for Approximating the Post Collision Interaction (PCI) in Electron-Impact Ionization of Atoms
Adam Upshaw, Hari Saha, Don Madison
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Thursday, October 22, 2009
3:00PM - 3:15PM
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TR2.00006: Electron scattering {\&} high resolution spectroscopy from cold atoms in an AC-MOT
Andrew Murray, Matthew Harvey
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Thursday, October 22, 2009
3:15PM - 3:30PM
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TR2.00007: Production of Excited Atomic Hydrogen and Deuterium from H$_{2}$, D$_{2}$ and HD Photodissociation
J.R. Machacek, V.M. Andrianarijaona, J.E. Furst, T.J. Gay, A.L.D. Kilcoyne, A.L. Landers, K.W. McLaughlin
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Session TR3: Plasma Chemistry
Chair: Robert Hicks, UCLA
Room: Saratoga Hilton Ballroom 3
Thursday, October 22, 2009
1:30PM - 1:45PM
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TR3.00001: Manipulating Plasma Surface Interaction
Stephan Reuter, Kari Niemi, Volker Schulz-von der Gathen, Timo Gans
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Thursday, October 22, 2009
1:45PM - 2:00PM
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TR3.00002: Comparsion of mass spectra measurements and kinetic modelling of high pressure He-Air glow discharges
K.R. Stalder, R.J. Vidmar, W.G. Graham, Y.A. Gonzalvo
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Thursday, October 22, 2009
2:00PM - 2:15PM
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TR3.00003: Partial modeling for plasma assisted combustion -- Turbine combustor application
Boris Potapkin, Maxim Deminsky, Marina Strelkova, Irina Chernysheva, Igor Kochetov, Seyed Saddoughi, John T. Herbon, Timothy Sommerer
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Thursday, October 22, 2009
2:15PM - 2:45PM
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TR3.00004: Effects of non-thermal plasmas and electric field on hydrocarbon/air flames
Invited Speaker:
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Thursday, October 22, 2009
2:45PM - 3:15PM
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TR3.00005: Ultrahigh quality amorphous silicon film deposition for solar cells employing novel plasma enhanced CVD
Invited Speaker:
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Thursday, October 22, 2009
3:15PM - 3:30PM
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TR3.00006: Effect of acetylene portion on the properties of high frequency discharge in argon
Irina Schweigert, Dmitry Ariskin
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