62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009;
Saratoga Springs, New York
Session Index
Session SR1: Biological and Emerging Applications II
Chair: Magnus Bergkvist, College of Nanscale Science and Engineering, University at Albany
Room: Saratoga Hilton Ballroom 1
Thursday, October 22, 2009
10:00AM - 10:30AM
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SR1.00001: Cold atmospheric plasma sterilization: from bacteria to biomolecules
Invited Speaker:
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Thursday, October 22, 2009
10:30AM - 10:45AM
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SR1.00002: Sterilization and Mechanism of Microorganisms on A4 Paper by Dielectric Barrier Discharges Plasma at Atmospheric Pressure
Jia Xianghong, Wan Jun, Yang Jinhua, Xu Feng, Wang Shouguo
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Thursday, October 22, 2009
10:45AM - 11:00AM
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SR1.00003: Sterilization of Surfaces with a Handheld Atmospheric Pressure Plasma
Robert Hicks, Sara Habib, Wai Chan, Eleazar Gonzalez, A. Tijerina, Mark Sloan
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Thursday, October 22, 2009
11:00AM - 11:15AM
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SR1.00004: Characterization of a new VHF-CCP for Sterilization
Katharina Stapelmann, Nikita Bibinov, Joachim Wunderlich, Peter Awakowicz
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Thursday, October 22, 2009
11:15AM - 11:30AM
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SR1.00005: Pulsed plasma polymerization of Ethylene Glycol for development of ultra thin biocompatible interfaces
G. Padron-Wells, I.C. Estrada-Raygoza, L.J. Overzet, M.J. Goeckner
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Thursday, October 22, 2009
11:30AM - 11:45AM
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SR1.00006: Selective Encapsulation of Heterogeneous Fullerene Ions Into Single-Walled Carbon Nanotubes
Toshiro Kaneko, Yohei Hanabusa, Takatsugu Nagai, Rikizo Hatakeyama
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Session SR2: Electron and Positron Collisions with Atoms
Chair: Thomas M. Miller, Boston College
Room: Saratoga Hilton Ballroom 2
Thursday, October 22, 2009
10:00AM - 10:30AM
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SR2.00001: Electron impact induced light emission from zinc atoms
Invited Speaker:
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Thursday, October 22, 2009
10:30AM - 10:45AM
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SR2.00002: Benchmark calculations for electron collisions with mercury
Oleg Zatsarinny, Klaus Bartschat
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Thursday, October 22, 2009
10:45AM - 11:00AM
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SR2.00003: Complex $q$ parameters for helium $L=0,1,2$ autoionizing levels
N.L.S Martin, B.A. deHarak, K. Bartschat
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Thursday, October 22, 2009
11:00AM - 11:15AM
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SR2.00004: Differential cross sections for modeling of noble gas plasmas
Allan Stauffer, Robert McEachran
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Thursday, October 22, 2009
11:15AM - 11:30AM
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SR2.00005: Accurate atomic data for xenon: energy levels, oscillator strengths, and electron collision cross sections
Klaus Bartschat, Oleg Zatsarinny
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Thursday, October 22, 2009
11:30AM - 11:45AM
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SR2.00006: Electron excitation into the Xe($5p^57p$) configuration from the ground and $1s_5$ ($J$=2) metastable level
R.O. Jung, John B. Boffard, L.W. Anderson, Chun C. Lin
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Thursday, October 22, 2009
11:45AM - 12:00PM
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SR2.00007: Positron Interactions with Rare Gas Atoms
A. Jones, P. Caradonna, C. Makochekanwa, J. Sullivan, D. Slaughter, S. Buckman, D. Mueller, S. Bellm, B. Lohmann
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Session SR3: Plasma-Surface Interactions
Chair: Song-yun Kang, Tokyo Electron Ltd
Room: Saratoga Hilton Ballroom 3
Thursday, October 22, 2009
10:00AM - 10:30AM
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SR3.00001: Plasma surface interactions in fluorocarbon systems
Invited Speaker:
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Thursday, October 22, 2009
10:30AM - 10:45AM
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SR3.00002: Temperature Impact on Plasma-Surface Interactions in an FC Plasma Environment
Caleb Nelson, Iqbal Saraf, Lawrence Overzet, Matthew Goeckner
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Thursday, October 22, 2009
10:45AM - 11:00AM
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SR3.00003: SiO$_{2}$ Film Etching Process Using Environment-Friendly New Gas C$_{5}$F$_{7}$H
Yudai Miyawaki, Keigo Takeda, Azumi Ito, Masahiro Nakamura, Makoto Sekine, Masaru Hori
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Thursday, October 22, 2009
11:00AM - 11:15AM
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SR3.00004: Plasma-surface interactions during Si etching in Cl- and Br-based plasmas: An empirical and atomistic study
Hirotaka Tsuda, Tatsuya Nagaoka, Hiroki Miyata, Yoshinori Takao, Koji Eriguchi, Kouichi Ono
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Thursday, October 22, 2009
11:15AM - 11:30AM
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SR3.00005: Analysis of the surface reactions of ArF photoresist during fluorocarbon plasma etching by XPS
Takuya Takeuchi, Makoto Sekine, Hirotaka Toyoda, Keigo Takeda, Masaru Hori, Song-Yun Kang, Ikuo Sawada
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Thursday, October 22, 2009
11:30AM - 11:45AM
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SR3.00006: Determination of gas phase and surface reactions in plasma polymerization
Dirk Hegemann
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Thursday, October 22, 2009
11:45AM - 12:00PM
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SR3.00007: Role of plasma activation in the kinetics of CNT growth in PECVD process
Irina Lebedeva, Alexey Gavrikov, Alexey Baranov, Maxim Belov, Andrey Knizhnik, Boris Potapkin, Timothy Sommerer
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