Bulletin of the American Physical Society

62nd Annual Gaseous Electronics Conference

Volume 54, Number 12

Tuesday–Friday, October 20–23, 2009; Saratoga Springs, New York

Session Index

Session HT1: Inductively Coupled Plasmas

Chair: Hirotaka Toyoda, Nagoya University
Room: Saratoga Hilton Ballroom 1

Tuesday, October 20, 2009 1:30PM - 2:00PM		HT1.00001: Electron heating in inductive discharges Invited Speaker: Preview Abstract
Tuesday, October 20, 2009 2:00PM - 2:30PM		HT1.00002: Production and Control of Inductively-Coupled Plasmas with Multiple Low-Inductance Antenna Modules for Large-Area and Low-Damage Processes of Next-Generation Devices Invited Speaker: Preview Abstract
Tuesday, October 20, 2009 2:30PM - 2:45PM		HT1.00003: Global model of instabilities in low-pressure inductively coupled chlorine plasmas Emilie Despiau-Pujo, Pascal Chabert Preview Abstract
Tuesday, October 20, 2009 2:45PM - 3:00PM		HT1.00004: A control-oriented self-consistent model of an inductively-coupled plasma Bernard Keville, Miles Turner Preview Abstract
Tuesday, October 20, 2009 3:00PM - 3:15PM		HT1.00005: Effects of RF-bias power on plasma parameters in a low gas pressure inductively coupled plasma Hyo-Chang Lee, Min-Hyong Lee, Chin-Wook Chung Preview Abstract
Tuesday, October 20, 2009 3:15PM - 3:30PM		HT1.00006: Low-pressure inductive gas discharges in Ar, Kr, He and Ar+Hg mixture Natalia Denisova, Revalde Gita, Skudra Atis Preview Abstract

Session HT2: DC, Pulsed, RF and Microwave Glows

Chair: Siva Kanakasabapathy, IBM
Room: Saratoga Hilton Ballroom 2

Tuesday, October 20, 2009 1:30PM - 1:45PM		HT2.00001: Temporal variation of plasma density in atmospheric-pressure pulsed-microwave plasma Hirotaka Toyoda, Haipeng Yang, Tatsuo Ishijima Preview Abstract
Tuesday, October 20, 2009 1:45PM - 2:00PM		HT2.00002: The rf Micro-Hollow Device P.D. Maguire, C.M.O. Mahony, J. Greenan, T. Gans, D. O'Connell, W.G. Graham Preview Abstract
Tuesday, October 20, 2009 2:00PM - 2:15PM		HT2.00003: Temporal and Spatial evolution of the EEP$f$ and the Discharge Mechanism in a Microwave Surface-Wave Plasma Ron Bravenec, Jianping Zhao, Merritt Funk, Lee Chen, Toshihisa Nozawa Preview Abstract
Tuesday, October 20, 2009 2:15PM - 2:30PM		HT2.00004: The Presence of Normal Modes Above a Capacitive Plasma Applicator Walter Gekelman, Michael Barnes, Steven Vincena, Patrick Pribyl Preview Abstract
Tuesday, October 20, 2009 2:30PM - 2:45PM		HT2.00005: Gas Temperature Measurement in a Glow Discharge Plasma Kenneth Sloneker, Nirmol Podder, William E. McCurdy, Shi Shi Preview Abstract
Tuesday, October 20, 2009 2:45PM - 3:00PM		HT2.00006: Ar glow discharge -- benchmark for state-of-art modeling Nicolai Dyatko, Igor Kochetov, Anatolii Napartovich, Timothy Sommerer Preview Abstract
Tuesday, October 20, 2009 3:00PM - 3:15PM		HT2.00007: Silicon oxide permeation barrier coating of PET bottles and foils Simon Steves, Michael Deilmann, Peter Awakowicz Preview Abstract
Tuesday, October 20, 2009 3:15PM - 3:30PM		HT2.00008: Transverse Gas Flow RF Slab Discharge Generator of Singlet Delta Oxygen for Oxygen-Iodine Laser Andrey Ionin, Yurii Klimachev, Oleg Rulev, Leonid Seleznev, Dmitry Sinitsyn, Igor Kochetov, Anatoly Napartovich Preview Abstract

Session HT3: Optical Diagnostics I

Chair: Marc Schaepkens, Momentive Performance Materials
Room: Saratoga Hilton Ballroom 3

Tuesday, October 20, 2009 1:30PM - 2:00PM		HT3.00001: Laser Thomson scattering diagnostics of low-temperature plasmas Invited Speaker: Preview Abstract
Tuesday, October 20, 2009 2:00PM - 2:15PM		HT3.00002: Two-dimensional mapping of electron densities and temperatures using laser-collisonal fluorescence Edward Barnat, Kraig Frederickson Preview Abstract
Tuesday, October 20, 2009 2:15PM - 2:30PM		HT3.00003: Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes Jean-Paul Booth, Jerome Bredin Preview Abstract
Tuesday, October 20, 2009 2:30PM - 3:00PM		HT3.00004: Integration of PIC simulations and magnetic-sublevel atomic kinetics for plasma polarization spectroscopy Invited Speaker: Preview Abstract
Tuesday, October 20, 2009 3:00PM - 3:15PM		HT3.00005: Diagnostic based Modelling for Determination of Absolute Atomic Oxygen Densities in Cold Atmospheric Pressure Plasmas Stephan Reuter, Kari Niemi, Lucy M. Graham, Jochen Waskoenig, Timo Gans Preview Abstract
Tuesday, October 20, 2009 3:15PM - 3:30PM		HT3.00006: Nonlinear Zeeman Spectroscopy of Nitric Oxide in Strong Magnetic Field Andrei Kotkov, Andrei Ionin, Yurii Klimachev, Andrei Kozlov Preview Abstract

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Bulletin of the American Physical Society

62nd Annual Gaseous Electronics Conference

Volume 54, Number 12

Tuesday–Friday, October 20–23, 2009; Saratoga Springs, New York

Session Index

Session HT1: Inductively Coupled Plasmas

Session HT2: DC, Pulsed, RF and Microwave Glows

Session HT3: Optical Diagnostics I

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