62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009;
Saratoga Springs, New York
Session Index
Session XF2: Capacitively-Coupled Plasmas II
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Chair: Pascal Chabert, CNRS - Ecole Polytechnique
Room: Saratoga Hilton Ballroom 2
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Friday, October 23, 2009
10:00AM - 10:15AM
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XF2.00001: High Frequency Capacitively Coupled Plasmas: Implicit Electron Momentum Transport with a Full-wave Maxwell Solver
Yang Yang, Mark Kushner
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Friday, October 23, 2009
10:15AM - 10:30AM
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XF2.00002: Space- and Time-dependent electron velocity distribution in VHF-CCP in CF$_{4}$/Ar
Takashi Yagisawa, Toshiaki Makabe
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Friday, October 23, 2009
10:30AM - 10:45AM
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XF2.00003: A scalable, VHF/UHF, capacitively coupled plasma source for large-area applications at high frequencies
Bert Ellingboe, David O'Farrell, Cezar Gaman, Fiachra Green, Neal O'Hara, Tomasz Michna
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Friday, October 23, 2009
10:45AM - 11:00AM
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XF2.00004: Selective Influence of Magnetic Field Direction on Plasma Uniformity
Wenli Collison, Vladimir Kudriavtsev, Michael Barnes, Mark Kushner
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Friday, October 23, 2009
11:00AM - 11:15AM
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XF2.00005: Experimental and theoretical studies of the electrode impedance effect in capacitive discharges
Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann, Yohei Yamazawa
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Friday, October 23, 2009
11:15AM - 11:30AM
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XF2.00006: Influence of collisions on spatial damping of electrostatic electron waves in a low-pressure plasma
Jens Oberrath, Ralf Peter Brinkmann
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Friday, October 23, 2009
11:30AM - 11:45AM
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XF2.00007: Intermediate frequency breakdown
Derek Monahan, Miles Turner
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Friday, October 23, 2009
11:45AM - 12:00PM
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XF2.00008: Atmospheric Pressure RF Plasma Electrical and Optical Characteristics
Ali Gulec, Lutfi Oksuz, Noah Hershkowitz
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