Bulletin of the American Physical Society
62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009; Saratoga Springs, New York
Session JT1: Sheaths
4:00 PM–5:30 PM,
Tuesday, October 20, 2009
Saratoga Hilton
Room: Ballroom 1
Chair: Eric Joseph, IBM T.J. Watson Research Center
Abstract ID: BAPS.2009.GEC.JT1.5
Abstract: JT1.00005 : Ion Flux Formation in 2 MHz Capacitive Discharge at Different Gas Pressures*
5:00 PM–5:15 PM
Preview Abstract
Abstract
Author:
Irina Schweigert
(Institute of Theoretical and Applied Mechanics, Russian Academy of Sciences)
Collaboration:
Institute of Theoretical and Applied Mechanics, Russian Academy of Sciences
*This work was supported by the RFBR grant (08-02-00833a).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2009.GEC.JT1.5
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