Bulletin of the American Physical Society
62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009; Saratoga Springs, New York
Session HT1: Inductively Coupled Plasmas
1:30 PM–3:30 PM,
Tuesday, October 20, 2009
Saratoga Hilton
Room: Ballroom 1
Chair: Hirotaka Toyoda, Nagoya University
Abstract ID: BAPS.2009.GEC.HT1.3
Abstract: HT1.00003 : Global model of instabilities in low-pressure inductively coupled chlorine plasmas
2:30 PM–2:45 PM
Preview Abstract Abstract
Authors:
Emilie Despiau-Pujo
(LPP - Ecole Polytechnique)
Pascal Chabert
(LPP - Ecole Polytechnique)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2009.GEC.HT1.3
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