Bulletin of the American Physical Society
62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009; Saratoga Springs, New York
Session GT1: Plasma Aided Implantation
10:00 AM–12:00 PM,
Tuesday, October 20, 2009
Saratoga Hilton
Room: Ballroom 1
Chair: Svetlana Radovanov, Varian Semiconductor
Abstract ID: BAPS.2009.GEC.GT1.2
Abstract: GT1.00002 : Multi-frequency, finite-wavelength and dc-augmentation effects in large area capacitive sources*
10:30 AM–11:00 AM
Preview Abstract
Abstract
Author:
Mark Kushner
(University of Michigan)
*Work supported by Semiconductor Research Corp., Tokyo Electron, Applied Materials and Department of Energy.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2009.GEC.GT1.2
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