Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session Index
Session QR1: Fluorocarbon Plasmas II
Chair: J-P Booth, LPTP Ecole Polytechnique, France, and MJ Brunger, Flinders University, SA, AustraliaRoom: Salon E
Thursday, October 16, 2008 10:00AM - 10:30AM |
QR1.00001: Control of Fluorocarbon Plasmas for Next-Generation ULSI Devices Invited Speaker: Preview Abstract | |
Thursday, October 16, 2008 10:30AM - 11:00AM |
QR1.00002: New insights into fundamental ion-surface interactions Invited Speaker: Preview Abstract | |
Thursday, October 16, 2008 11:00AM - 11:30AM |
QR1.00003: Electron Scattering from Fluorocarbons and Their Radicals Invited Speaker: Preview Abstract | |
Thursday, October 16, 2008 11:30AM - 12:00PM |
QR1.00004: Molecular dynamics simulations of blanket and small feature etching in fluorocarbon- and fluorine-containing plasmas Invited Speaker: Preview Abstract |
Session QR2: Electron Impact Ionization of Atoms and Molecules
Chair: Klaus Bartschat, Drake UniversityRoom: Salon A-D
Thursday, October 16, 2008 10:00AM - 10:30AM |
QR2.00001: Out of plane ($e,2e$) experiments on helium autoionizing levels Invited Speaker: Preview Abstract | |
Thursday, October 16, 2008 10:30AM - 11:00AM |
QR2.00002: Electron Impact Ionization of the Rare Gases Invited Speaker: Preview Abstract | |
Thursday, October 16, 2008 11:00AM - 11:15AM |
QR2.00003: GEC Student Award for Excellence Finalist: Atomic and Molecular Signatures for charged particle ionization Ola Al-Hagan, Don Madison, Christian Kaiser, Andrew Murray Preview Abstract | |
Thursday, October 16, 2008 11:15AM - 11:30AM |
QR2.00004: Accuracy of the Gamow Factor for Approximating the PCI (Post Collision Interaction) in Electron-Impact Ionization of Atoms D.H. Madison, H.P. Saha, B. Lohmann, M.A. Stevenson, L.R. Hargreaves Preview Abstract | |
Thursday, October 16, 2008 11:30AM - 11:45AM |
QR2.00005: ABSTRACT WITHDRAWN Preview Abstract | |
Thursday, October 16, 2008 11:45AM - 12:00PM |
QR2.00006: ABSTRACT WITHDRAWN Preview Abstract |
Session QR3: High Pressure Glow Discharges
Chair: Masaru Hori, Nagoya University, JapanRoom: Addison Room
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