61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008;
Dallas, Texas
Session Index
Session PR1: Fluorocarbon Plasmas I
Chair: Truell Hyde, Baylor University
Room: Salon E
Thursday, October 16, 2008
8:00AM - 8:30AM
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PR1.00001: Study of the ion induced etching for Si and SiO2 with F+ and CFX(X=1,2,3)+ ions
Invited Speaker:
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Thursday, October 16, 2008
8:30AM - 8:45AM
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PR1.00002: Initial Formation of Carbon Nanowalls Synthesized by Ar Ions and CF$_{X}$/H Radicals
Shingo Kondo, Olivera Stepanovic, Makoto Sekine, Masaru Hori, Koji Yamakawa, Shoji Den, Mineo Hiramatsu
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Thursday, October 16, 2008
8:45AM - 9:00AM
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PR1.00003: Critical roles of CF$_{4}$ and SiCl$_{4}$ plasma treatments on AlGaN/GaN transistor performance
Anirban Basu, Ilesanmi Adesida
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Thursday, October 16, 2008
9:00AM - 9:15AM
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PR1.00004: On the effect of additional CF$_2$ scattering data on a CF$_4$/O$_2$ plasma etch simulation
James J. Munro, Natasha Doss, Jonathan Tennyson, Song-Yun Kang, Masato Kawakami, Sumie Segawa
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Thursday, October 16, 2008
9:15AM - 9:30AM
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PR1.00005: Li$^{+}$ attachment mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CF$_{4}$, Ar/CF$_{4}$/O$_{2}$ and Ar/CF$_{4}$/H$_{2}$ plasmas
Kenji Furuya, Hiroshi Okumura, Yuji Tamai, Akihiro Ide, Akira Harata
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Session PR2: Ion Atom Collisions I
Chair: M. Schulz, Missouri University of Science and Technology
Room: Salon A-D
Session PR3: High Pressure Discharges and Liquids
Chair: L. Vuskovic, Old Dominion University
Room: Addison Room
Thursday, October 16, 2008
8:00AM - 8:15AM
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PR3.00001: Diagnostics of nonequilibrium atmospheric pressure plasma with ultra high electron density for surface cleaning processes
Hirotoshi Inui, Yuto Matsudaira, Masaru Hori, Naofumi Yoshida, Hiroyuki Kano
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Thursday, October 16, 2008
8:15AM - 8:30AM
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PR3.00002: Diagnostics of Microwave Bubble Plasma in Liquid
Hirotaka Toyoda, Hiroyasu Sugiura, Ryota Saito, Tatsuo Ishijima
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Thursday, October 16, 2008
8:30AM - 8:45AM
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PR3.00003: Propagation of pulsed discharges in water
Paul Ceccato, Olivier Guaitella, Antoine Rousseau
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Thursday, October 16, 2008
8:45AM - 9:00AM
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PR3.00004: GEC Student Award for Excellence Finalist: Creation of Stable Plasma-Liquid Interfaced Reactive Field using Ionic Liquids
Kazuhiko Baba, Toshiro Kaneko, Rikizo Hatakeyama
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Thursday, October 16, 2008
9:00AM - 9:15AM
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PR3.00005: Properties of plasma-liquid system based on the discharge in gas channel with liquid wall at the ultrasonic cavitation
Valeriy Chernyak, Sergey Olshewskii, Iryna Prysiazhnevych, Olena Solomenko
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Thursday, October 16, 2008
9:15AM - 9:30AM
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PR3.00006: Diagnostics of plasma reaction fields in supercritical fluid by using micro-Raman spectroscopy
Takaaki Tomai, Hirokazu Kikuchi, Koya Saito, Hiroharu Yui, Kazuo Terashima
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