61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008;
Dallas, Texas
Session Index
Session WF1: Plasma Diagnostics II
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Show Abstracts |
Chair: M. Goeckner, The University of Texas at Dallas
Room: Salon E
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Friday, October 17, 2008
10:00AM - 10:15AM
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WF1.00001: Origin of electrical changes at plasma etching endpoints
Mark Sobolewski, David Lahr
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Friday, October 17, 2008
10:15AM - 10:30AM
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WF1.00002: Photon-assisted Beam Probes for Low Temperature Plasmas
Alvaro Garcia de Gorordo, Gary A. Hallock
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Friday, October 17, 2008
10:30AM - 10:45AM
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WF1.00003: Negative Ion Densities and EEDFs in BCl$_{3}$/N$_{2}$ and BCl$_{3}$/SF$_{6}$ CCP Plasmas
Bogdan Pathak, John Alexander, Karen Nordheden
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Friday, October 17, 2008
10:45AM - 11:00AM
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WF1.00004: Application of an RF Biased Langmuir Probe to Etch Reactor Chamber Matching, Fault Detection and Process Control
Douglas Keil, Jean-Paul Booth, Neil Benjamin, Chris Thorgrimsson, Mitchell Brooks, Mikio Nagai, Luc Albarede, Jung Kim
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Friday, October 17, 2008
11:00AM - 11:15AM
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WF1.00005: Simultaneous determination of electron density and electron temperature in low-pressure plasmas using the Multipole Resonance Probe
Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann
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Friday, October 17, 2008
11:15AM - 11:30AM
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WF1.00006: A direct measurement of the energy flux density in plasma surface interaction
Remi Dussart, Anne-Lise Thomann, Nadjib Semmar, Laurianne Pichon, Larbi Bedra, Jacky Mathias, Yves Tessier, Philippe Lefaucheux
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Friday, October 17, 2008
11:30AM - 11:45AM
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WF1.00007: Development of a compact, high energy electron beam source
Scott Walton, Richard Fernsler, Robert Meger
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Friday, October 17, 2008
11:45AM - 12:00PM
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WF1.00008: ABSTRACT WITHDRAWN
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