Bulletin of the American Physical Society

61st Annual Gaseous Electronics Conference

Volume 53, Number 10

Monday–Friday, October 13–17, 2008; Dallas, Texas

Session Index

Session QR1: Fluorocarbon Plasmas II	Show Abstracts
Chair: J-P Booth, LPTP Ecole Polytechnique, France, and MJ Brunger, Flinders University, SA, Australia Room: Salon E

Thursday, October 16, 2008 10:00AM - 10:30AM		QR1.00001: Control of Fluorocarbon Plasmas for Next-Generation ULSI Devices Invited Speaker: Preview Abstract
Thursday, October 16, 2008 10:30AM - 11:00AM		QR1.00002: New insights into fundamental ion-surface interactions Invited Speaker: Preview Abstract
Thursday, October 16, 2008 11:00AM - 11:30AM		QR1.00003: Electron Scattering from Fluorocarbons and Their Radicals Invited Speaker: Preview Abstract
Thursday, October 16, 2008 11:30AM - 12:00PM		QR1.00004: Molecular dynamics simulations of blanket and small feature etching in fluorocarbon- and fluorine-containing plasmas Invited Speaker: Preview Abstract

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Bulletin of the American Physical Society

61st Annual Gaseous Electronics Conference

Volume 53, Number 10

Monday–Friday, October 13–17, 2008; Dallas, Texas

Session Index

Session QR1: Fluorocarbon Plasmas II

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