61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008;
Dallas, Texas
Session Index
Session CT3: Magnetically-Enhanced and Related Plasmas
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Chair: Pascal Chabert, CNRS-Ecole Polytechnique, France
Room: Addison Room
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Tuesday, October 14, 2008
10:00AM - 10:15AM
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CT3.00001: Investigations of Magnetically Enhanced RIE Reactors with Rotating Magnetic Fields
Natalia Yu. Babaeva, Mark J. Kushner
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Tuesday, October 14, 2008
10:15AM - 10:30AM
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CT3.00002: ABSTRACT WITHDRAWN
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Tuesday, October 14, 2008
10:30AM - 11:00AM
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CT3.00003: On the Plasma Parameters in the High Power Impulse Magnetron Sputtering Discharge (HiPIMS)
Invited Speaker:
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Tuesday, October 14, 2008
11:00AM - 11:15AM
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CT3.00004: \textit{IPD} -The Use of Impulse Plasma in Surface Engineering
Krzysztof Zdunek
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Tuesday, October 14, 2008
11:15AM - 11:30AM
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CT3.00005: Practical helicon sources using permanent magnets
Francis F. Chen
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Tuesday, October 14, 2008
11:30AM - 11:45AM
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CT3.00006: Time and space-resolved measurements of the neutral gas density in a helicon reactor by TALIF
Laurent Liard, Ane Aanesland, Jacques Jolly, Jean-Luc Raimbault, Pascal Chabert
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