Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session FTP1: Poster Session I (19:00-21:30)
7:00 PM,
Tuesday, October 14, 2008
Room: Salon F-J
Chair: I. Langmuir
Abstract ID: BAPS.2008.GEC.FTP1.5
Abstract: FTP1.00005 : Interaction Analysis of Multi-frequency RF powers in Dual Coil Inductively Coupled Plasma Etcher
Preview Abstract Abstract
Authors:
Heeyeop Chae
(Department of Chemical Engineering, Sungkyunkwan University, Suwon, 440-746, Korea)
Haegyoo Chang
(Department of Chemical Engineering, Sungkyunkwan University, Suwon, 440-746, Korea)
Kun Joo Park
(DMS Co., Ltd., Suwon, 445-810, Korea)
Robert Kim
(DMS Co., Ltd., Suwon, 445-810, Korea)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.FTP1.5
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