60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007;
Arlington, Virginia
Session Index
Session ET1: Plasma-Surface Interactions
Chair: Antoine Rousseau, LPTP
Room: Doubletree Crystal City Crystal Ballroom A
Tuesday, October 2, 2007
4:00PM - 4:15PM
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ET1.00001: Student Excellence Award Finalist: Surface recombination study in near real time in Cl$_{2}$ plasmas
Joydeep Guha, Vincent M. Donnelly
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Tuesday, October 2, 2007
4:15PM - 4:30PM
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ET1.00002: Analysis of plasma-surface interactions during plasma etching by in-situ diagnostics of reactants and reaction products
Yoshinori Ueda, Masahiro Yoshida, Koji Eriguchi, Kouichi Ono
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Tuesday, October 2, 2007
4:30PM - 4:45PM
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ET1.00003: Experimental study and modeling of plasma-polymer interactions
Anatoly Napartovich, Yuri Akishev, Mikhail Grushin, Nikolay Dyatko, Igor Kochetov, Nikolay Trushkin, Tran Duc, Francoise Sommer
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Tuesday, October 2, 2007
4:45PM - 5:00PM
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ET1.00004: Hydrogen plasma interaction with graphite surface
Gilles Cartry, Cedric Thomas, Jean-Marc Layet, Thierry Angot
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Tuesday, October 2, 2007
5:00PM - 5:30PM
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ET1.00005: Plasma-Surface Interactions With Advanced Polymers For Nanoscale Patterning Of Materials
Invited Speaker:
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Tuesday, October 2, 2007
5:30PM - 5:45PM
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ET1.00006: Comparison of gas-phase chemistry during deposition of amorphous carbon films using capacitive and inductive discharges.
S. Ramachandran, L. Overzet, W. Hu, L.S.N. Tao, G.-S. Lee, C. Nelson, M. Goeckner
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Session ET2: Electronegative Plasmas
Chair: Matt Goeckner, University of Texas at Dallas
Room: Doubletree Crystal City Crystal Ballroom B
Tuesday, October 2, 2007
4:00PM - 4:30PM
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ET2.00001: Plasma-Based Low Energy Ion Implantation
Invited Speaker:
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Tuesday, October 2, 2007
4:30PM - 4:45PM
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ET2.00002: Theory and particle-in-cell simulation of ion-ion plasmas
Gary Leray, Albert Meige, Jean-Luc Raimbault, Pascal Chabert
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Tuesday, October 2, 2007
4:45PM - 5:00PM
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ET2.00003: Propagating double layers in electronegative plasmas
Albert Meige, Nicolas Plihon, Gerjan Hagelaar, Jean-Pierre Boeuf, Pascal Chabert, Rod Boswell
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Tuesday, October 2, 2007
5:00PM - 5:15PM
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ET2.00004: Very High Frequency Capacitively Coupled Plasmas of Electronegative Gases
Shahid Rauf, Kallol Bera, Alex Paterson, Ken Collins
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Tuesday, October 2, 2007
5:15PM - 5:30PM
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ET2.00005: Fast silicon etching by plasma-sheath-lens focused negative ions
Eugen Stamate
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Tuesday, October 2, 2007
5:30PM - 5:45PM
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ET2.00006: Plasma Characterization of Electronegatively diluted VHF CCP Plasmas
Alex Paterson, Ned Hammond, Shahid Rauf, Ed Barnat, Paul Miller, Greg Hebner
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Tuesday, October 2, 2007
5:45PM - 6:00PM
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ET2.00007: Formation of ion flux in low frequency and low pressure ccrf discharge
I.V. Schweigert
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