Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session MWP1: Poster Session II
4:00 PM,
Wednesday, October 3, 2007
Doubletree Crystal City
Room: Crystal Ballroom C, 4:00pm - 6:00pm
Abstract ID: BAPS.2007.GEC.MWP1.46
Abstract: MWP1.00046 : The plasma parameters in a high power impulse magnetron sputtering discharge (HiPIMS)
Preview Abstract Abstract
Authors:
J.T. Gudmundsson
(Science Institute, University of Iceland)
P. Sigurjonsson
(Science Institute, University of Iceland)
D. Lundin
(IFM Materials Science, Linkoping University)
U. Helmersson
(IFM Materials Science, Linkoping University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.MWP1.46
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