Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session MWP1: Poster Session II
4:00 PM,
Wednesday, October 3, 2007
Doubletree Crystal City
Room: Crystal Ballroom C, 4:00pm - 6:00pm
Abstract ID: BAPS.2007.GEC.MWP1.40
Abstract: MWP1.00040 : Development of light source using micro hollow cathode plasma for monitoring absolute densities of metal atoms in magnetron sputtering
Preview Abstract Abstract
Authors:
Takayuki Ohta
(Wakayama University)
Yoshihiro Tachibana
(Wakayama University)
Masafumi Ito
(Wakayama University)
Seigo Takashima
(Nagoya University)
Yasuhiro Higashijima
(NU System Co., Ltd.)
Hiroyuki Kano
(NU EcoEngineering Co., Ltd.)
Shoji Den
(Katagiri Engineering Co., Ltd.)
Masaru Hori
(Nagoya University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.MWP1.40
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