Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session FTP1: Poster Session I
7:30 PM,
Tuesday, October 2, 2007
Doubletree Crystal City
Room: Crystal Ballroom C, 7:30pm - 9:30pm
Abstract ID: BAPS.2007.GEC.FTP1.52
Abstract: FTP1.00052 : Computational Study of the Dual Frequency Capacitive Discharge*
Preview Abstract Abstract
Authors:
Selma Cetiner
(Tech-X Corporation)
Seth Veitzer
(Tech-X Corporation)
Peter Stoltz
(Tech-X Corporation)
*This work supported by the Department of Energy, grant \#DE-FG02-03ER83797.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.FTP1.52
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