Bulletin of the American Physical Society
60th Gaseous Electronics Conference
Volume 52, Number 9
Tuesday–Friday, October 2–5, 2007; Arlington, Virginia
Session MWP1: Poster Session II
4:00 PM,
Wednesday, October 3, 2007
Doubletree Crystal City
Room: Crystal Ballroom C, 4:00pm - 6:00pm
Abstract ID: BAPS.2007.GEC.MWP1.49
Abstract: MWP1.00049 : Measurement of Ground State Oxygen Radical [O($^{3}$P)] in Surface Cleaning Process Employing Nonequilibrium Atmospheric-Pressure Pulsed Remote Plasma
Preview Abstract Abstract
Authors:
Masahiro Iwasaki
(Department of Electrical Engineering, Nagoya University)
Keigo Takeda
(Department of Electrical Engineering, Nagoya University)
Masaru Hori
(Department of Electrical Engineering, Nagoya University)
Masafumi Ito
(Faculty of Systems Engineering, Wakayama University)
Eiji Miyamoto
(Sekisui Chemical Co., Ltd.)
Takuya Yara
(Sekisui Chemical Co., Ltd.)
Tsuyoshi Uehara
(Sekisui Chemical Co., Ltd.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2007.GEC.MWP1.49
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