2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006;
Columbus, Ohio
Session Index
Session PR1: Plasma Applications for Nanotechnology
Chair: Toshiake Makabe, Keio University
Room: Holiday Inn Salon CD
Thursday, October 12, 2006
8:00AM - 8:30AM
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PR1.00001: Ultimate Top-down Etching Processes Using Advanced Neutral Beam for Future Nano-scale Devices
Invited Speaker:
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Thursday, October 12, 2006
8:30AM - 8:45AM
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PR1.00002: Deposition of vertically oriented single-walled carbon nanotubes in highly collisional atmospheric pressure plasma
Kuma Ohnishi, Tomohiro Nozaki, Ken Okazaki, Joachim Heberlein, Uwe Kortshagen
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Thursday, October 12, 2006
8:45AM - 9:00AM
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PR1.00003: Measurement of plasma density and electron energy distribution function in a filamented capacitively coupled silane-argon plasma
Ameya Bapat, Uwe Kortshagen
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Thursday, October 12, 2006
9:00AM - 9:15AM
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PR1.00004: Application of microplasma to synthesis of silicon nanoparticles
Kenji Sasaki, Tomohisa Ogino, Daisuke Asahi, Tomohiro Nozaki, Ken Okazaki
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Thursday, October 12, 2006
9:15AM - 9:30AM
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PR1.00005: Synthesis of highly monodisperse Ge crystals in a capacitively coupled flow through reactor for photovoltaic applications
Ryan Gresback, Uwe Kortshagen
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Session PR2: Computational Methods and Modeling for Plasmas
Chair: Jong Won Shon, Jusang Engineering
Room: Holiday Inn Salon B
Thursday, October 12, 2006
8:00AM - 8:15AM
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PR2.00001: Revisiting the anomalous skin layer
Igor Kaganovich
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Thursday, October 12, 2006
8:15AM - 8:30AM
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PR2.00002: Neutral gas depletion through high electron pressures in dense plasmas
Deborah O'Connell, Timo Gans, Dragos Crintea, Uwe Czarnetzki, Nader Sadeghi
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Thursday, October 12, 2006
8:30AM - 8:45AM
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PR2.00003: A benchmark study of the global model approximation
D.D. Monahan, M.M. Turner
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Thursday, October 12, 2006
8:45AM - 9:00AM
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PR2.00004: Simulation of Plasma Spectra Using PrismSPECT
Nicolas Pereyra, Joseph MacFarlane, Pamela Woodruff, Igor Golovkin, Ping Wang
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Thursday, October 12, 2006
9:00AM - 9:15AM
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PR2.00005: Cross-platform, multi-language libraries for ionization and surface interaction effects in plasmas
Peter Stoltz, Scott Sides, Nate Sizemore, Seth Veitzer, Miguel Furman, Jean-Luc Vay
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