2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006;
Columbus, Ohio
Session Index
Session BT1: Plasma Sources I
Chair: A.R. Ellingboe, Dublin City University, Ireland
Room: Holiday Inn Salon CD
Tuesday, October 10, 2006
8:00AM - 8:15AM
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BT1.00001: Electron beam-generated ion-ion plasmas: Etching and diagnostics
S.G. Walton, D. Leonhardt, R.F. Fernsler
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Tuesday, October 10, 2006
8:15AM - 8:30AM
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BT1.00002: Automated method for creating arbitrary substrate voltage wave forms for manipulating energy distribution of bombarding ions during plasma processing
Amy Wendt, Marlann Patterson, Hsuan-Yih Chu
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Tuesday, October 10, 2006
8:30AM - 8:45AM
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BT1.00003: Scaling laws in dc micro discharges
Marija Radmilovic-Radjenovic, Zoran Petrovic, Branislav Radjenovic, Paule Maguire, Charles Mahony
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Tuesday, October 10, 2006
8:45AM - 9:00AM
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BT1.00004: Hydrodynamic models for the positive column with neutral gas depletion.
Jean-Luc Raimbault, Laurent Liard, Pascal Chabert
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Tuesday, October 10, 2006
9:00AM - 9:15AM
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BT1.00005: Numerical Simulation of the DC Discharge Using CFD-ACE+
Ning Zhou, Peng Zhang
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Tuesday, October 10, 2006
9:15AM - 9:30AM
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BT1.00006: Simulation of moving striations in rare gas plasmas
Vladimir Kolobov, Robert Arslanbekov
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Session BT2: Plasma Boundaries: Sheaths and Boundary Layers
Chair: M.A. Lieberman, University of California, Berkeley
Room: Holiday Inn Salon B
Tuesday, October 10, 2006
8:00AM - 8:15AM
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BT2.00001: Electron Sheaths and Non-ambipolar Diffusion in Laboratory Plasma
Scott Baalrud, Noah Hershkowitz
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Tuesday, October 10, 2006
8:15AM - 8:30AM
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BT2.00002: Total Non-Ambipolar RF Electron Source -- Better than a Hollow Cathode
Noah Hershkowitz, Ben Longmier, Scott Baalrud
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Tuesday, October 10, 2006
8:30AM - 8:45AM
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BT2.00003: Arc cathode spots and normal spots on glow cathodes: self-organization phenomena
Mikhail Benilov
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Tuesday, October 10, 2006
8:45AM - 9:00AM
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BT2.00004: Revisiting the capacitive sheath
Igor Kaganovich
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Tuesday, October 10, 2006
9:00AM - 9:15AM
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BT2.00005: Influence of a micro-scale wafer structure upon sheath profile in 2f-CCP in SF$_6$/O$_2$
Fukutaro Hamaoka, Takashi Yagisawa, Toshiaki Makabe
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Tuesday, October 10, 2006
9:15AM - 9:30AM
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BT2.00006: Ion Energy Distribution Measured in Pulsed Boron Trifluoride Glow Discharge
Ludovic Godet, Svetlana Radovanov, Jay Scheuer, Christophe Cardinaud, Gilles Cartry
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