Bulletin of the American Physical Society
2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006; Columbus, Ohio
Session WF1: Capacitively Coupled Plasmas
10:00 AM–12:00 PM,
Friday, October 13, 2006
Holiday Inn
Room: Salon CD
Chair: Miles Turner, Dublin City University, Ireland
Abstract ID: BAPS.2006.GEC.WF1.7
Abstract: WF1.00007 : Frequency dependent ion kinetics in a 300 mm dual-frequency capacitively coupled plasma reactor
11:45 AM–12:00 PM
Preview Abstract Abstract
Authors:
G.A. Hebner
E.V. Barnat
P.A. Miller
(Sandia National Laboratories)
A.M. Paterson
J.P. Holland
(Applied Materials)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.WF1.7
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