Bulletin of the American Physical Society
2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006; Columbus, Ohio
Session SRP2: Poster IIB
4:00 PM,
Thursday, October 12, 2006
Holiday Inn
Room: Buckeye, 4:00pm - 5:30pm
Abstract ID: BAPS.2006.GEC.SRP2.15
Abstract: SRP2.00015 : Space and phase resolved electron energy distribution functions in an industrial dual-frequency capacitively coupled radio-frequency discharge*
Preview Abstract Abstract
Authors:
Julian Schulze
Timo Gans
Deborah O'Connell
Uwe Czarnetzki
(Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Germany)
Bert Ellingboe
Miles Turner
(NCPST, Dublin City University, Ireland)
*Funding: Lam Research Inc., SFI, the EU (FP5), the DFG (SFB 591 \& GK 1051)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.SRP2.15
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