2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006;
Columbus, Ohio
Session Index
Session GW1: Diagnostics I: Electrical
|
Show Abstracts |
Chair: Mark Sobolewski, National Institute of Standards and Technology
Room: Holiday Inn Salon CD
|
|
Wednesday, October 11, 2006
8:00AM - 8:15AM
|
|
GW1.00001: Detailed Time-resolved Plasma Diagnostics in a Pulsed DC Magnetron Discharge
Ian Swindells, Peter Kelly, James Bradley
Preview Abstract |
Wednesday, October 11, 2006
8:15AM - 8:30AM
|
|
GW1.00002: Investigation of total energy flux density at a floating substrate in pulsed DC unbalanced magnetron.
Martin Cada, Greg Clarke, James Bradley
Preview Abstract |
Wednesday, October 11, 2006
8:30AM - 8:45AM
|
|
GW1.00003: RF Impedance of a Spherical Probe at High and Low Gas Pressure
R.F. Fernsler, D.N. Walker, D.D. Blackwell, W.E. Amatucci, S.J. Messer
Preview Abstract |
Wednesday, October 11, 2006
8:45AM - 9:00AM
|
|
GW1.00004: Extended plasma parameter extraction using in-line RF metrology for multi-frequency plasma reactors
Steven Shannon, Daniel Hoffman, Matthew Miller
Preview Abstract |
Wednesday, October 11, 2006
9:00AM - 9:15AM
|
|
GW1.00005: Response of an Isolated Dust Particulate in a DC Glow Discharge Subjected to External Excitations
J. McFerran, J. West, V. Subramaniam, A. Kahraman
Preview Abstract |
Wednesday, October 11, 2006
9:15AM - 9:30AM
|
|
GW1.00006: Collisionless nonlinear damping of dust acoustic waves due to dust charge fluctuations
Jyotirmoy Pramanik
Preview Abstract |
