Bulletin of the American Physical Society
2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006; Columbus, Ohio
Session FPT1: Poster IA
7:15 PM,
Tuesday, October 10, 2006
Holiday Inn
Room: Salon A, 7:15pm - 9:15pm
Abstract ID: BAPS.2006.GEC.FPT1.4
Abstract: FPT1.00004 : Hafnium Oxide Film Synthesis via Laser Ablation Plasma Ion Deposition*
Preview Abstract Abstract
Authors:
N.M. Jordan
R.M. Gilgenbach
L.M. Wang
S. Zhu
M. Atzmon
Y.Y. Lau
(Plasma, Pulsed-Power, and Microwave Lab, Nuclear Engineering and Radiological Sciences Dept., University of Michigan)
M.C. Jones
(Sandia National Labs)
*Supported by the AFOSR MURI on Cathodes and RF Windows. NMJ is partially supported by an Applied Materials Graduate Fellowship.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.FPT1.4
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