Bulletin of the American Physical Society
2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006; Columbus, Ohio
Session ET1: Plasma Sources II
4:00 PM–5:30 PM,
Tuesday, October 10, 2006
Holiday Inn
Room: Salon CD
Chair: S.G. Walton, Naval Research Laboratory
Abstract ID: BAPS.2006.GEC.ET1.4
Abstract: ET1.00004 : Ionization processes in the high power impulse magnetron sputtering discharge (HIPIMS)
4:45 PM–5:00 PM
Preview Abstract Abstract
Authors:
Jon T. Gudmundsson
(University of Iceland)
Johan Bohlmark
(Chemfilt Ionsputtering AB)
Arutiun P. Ehiasarian
(Sheffield Hallam University)
Ulf Helmersson
(Linkoping University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.GEC.ET1.4
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