2006 59th Annual Gaseous Electronics Conference
Tuesday–Friday, October 10–13, 2006;
Columbus, Ohio
Session Index
Session BT2: Plasma Boundaries: Sheaths and Boundary Layers
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Chair: M.A. Lieberman, University of California, Berkeley
Room: Holiday Inn Salon B
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Tuesday, October 10, 2006
8:00AM - 8:15AM
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BT2.00001: Electron Sheaths and Non-ambipolar Diffusion in Laboratory Plasma
Scott Baalrud, Noah Hershkowitz
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Tuesday, October 10, 2006
8:15AM - 8:30AM
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BT2.00002: Total Non-Ambipolar RF Electron Source -- Better than a Hollow Cathode
Noah Hershkowitz, Ben Longmier, Scott Baalrud
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Tuesday, October 10, 2006
8:30AM - 8:45AM
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BT2.00003: Arc cathode spots and normal spots on glow cathodes: self-organization phenomena
Mikhail Benilov
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Tuesday, October 10, 2006
8:45AM - 9:00AM
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BT2.00004: Revisiting the capacitive sheath
Igor Kaganovich
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Tuesday, October 10, 2006
9:00AM - 9:15AM
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BT2.00005: Influence of a micro-scale wafer structure upon sheath profile in 2f-CCP in SF$_6$/O$_2$
Fukutaro Hamaoka, Takashi Yagisawa, Toshiaki Makabe
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Tuesday, October 10, 2006
9:15AM - 9:30AM
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BT2.00006: Ion Energy Distribution Measured in Pulsed Boron Trifluoride Glow Discharge
Ludovic Godet, Svetlana Radovanov, Jay Scheuer, Christophe Cardinaud, Gilles Cartry
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