2005 58th Gaseous Electronics Conference
Sunday–Thursday, October 16–20, 2005;
San Jose, California
Session Index
Session UH1: Etching Mechanisms
Chair: Eric Hudson, LAM Research
Room: Doubletree Hotel Pine
Thursday, October 20, 2005
8:00AM - 8:15AM
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UH1.00001: Profile simulation of high-aspect-ratio contact etching including charging effect
Seokhyun Lim, Yongjin Kim, Yero Lee, Taikyung Kim, Gyung-Jin Min, Chang-Jin Kang, HanKu Cho, Joo-Tae Moon
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Thursday, October 20, 2005
8:15AM - 8:30AM
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UH1.00002: A self-consistent modeling of feature profile evolution under competition between etching and deposition
Takashi Shimada, Takashi Yagisawa, Toshiaki Makabe
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Thursday, October 20, 2005
8:30AM - 8:45AM
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UH1.00003: Development of Nano-Contact Etch Process Using New Gas Chemistry.
Jong-Woo Sun, Chul-Ho Shin, Gyung-Jin Min, Chang-Jin Kang, HanKu Cho, Joo-Tae Moon
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Thursday, October 20, 2005
8:45AM - 9:00AM
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UH1.00004: Etching of high-$k$ and metal gate materials in high-density chlorine-containing plasmas
Kouichi Ono, Keisuke Nakamura, Kazushi Osari, Tomohiko Kitagawa, Kazuo Takahashi
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Thursday, October 20, 2005
9:00AM - 9:15AM
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UH1.00005: SiO$_{2}$ and Si$_{3}$N$_{4}$ Etch Mechanisms in NF$_{3}$/C$_{2}$H$_{4}$ Plasma
Puthajat Machima, Noah Hershkowitz
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Thursday, October 20, 2005
9:15AM - 9:30AM
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UH1.00006: Performance Tunable High-Frequency Inductively Coupled Plasma Technology in Application to Polysilicon Etcher and High Density Plasma CVD
Jong W. Shon, GiChung Kwon, Hong Y. Chang
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Session UH2: Glows II
Chair: Y. Sakai, Hokkaido University
Room: Doubletree Hotel Cedar
Thursday, October 20, 2005
8:00AM - 8:15AM
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UH2.00001: Analysis of the spatiotemporal behaviour of a He-Xe column plasma by self-consistent modelling
Detlef Loffhagen, Florian Sigeneger
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Thursday, October 20, 2005
8:15AM - 8:30AM
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UH2.00002: Self pulsing microdischarge in argon
Antoine Rousseau, Xavier Aubert
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Thursday, October 20, 2005
8:30AM - 8:45AM
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UH2.00003: Spatiotemporal development of low-pressure low-current discharges in argon
Dragana Mari\'c, Zoran Petrovi\'c
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Thursday, October 20, 2005
8:45AM - 9:00AM
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UH2.00004: Kinetics of electrons in BF$_3$
O. \v{S}a\v{s}i\'c, Z. Lj. Petrovi\'c, Z. Raspopovi\'c, L. Godet, S. Radovanov
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Thursday, October 20, 2005
9:00AM - 9:15AM
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UH2.00005: Radial distribution of plasma parameters in a BF$_{3}$ discharge
Ludovic Godet, Svetlana Radovanov, Rajesh Dorai, Gilles Cartry, Christophe Cardinaud
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Thursday, October 20, 2005
9:15AM - 9:30AM
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UH2.00006: Time resolved energy distribution of ions from a cathode sheath in a plasma doping system in BF$_{3}$
Ludovic Godet, Svetlana Radovanov, Ziwei Fang, James Buff, Gilles Cartry, Christophe Cardinaud
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