2005 58th Gaseous Electronics Conference
Sunday–Thursday, October 16–20, 2005;
San Jose, California
Session Index
Session RW1: Capacitively Coupled Plasmas
Chair: P. Chabert, Ecole Polytechnique, France
Room: Doubletree Hotel Pine
Wednesday, October 19, 2005
1:30PM - 1:45PM
|
|
RW1.00001: Breakdown in dual frequency capacitive discharges
Miles M. Turner
Preview Abstract |
Wednesday, October 19, 2005
1:45PM - 2:00PM
|
|
RW1.00002: Phase resolved optical emission spectroscopy on a dual frequency capacitively coupled rf discharge
Timo Gans, Julian Schulze, Uwe Czarnetzki, Miles M. Turner
Preview Abstract |
Wednesday, October 19, 2005
2:00PM - 2:15PM
|
|
RW1.00003: Frequency dependent spatial distributions of the electrons in a 300 mm diameter VHF capacitively coupled plasmas
Greg Hebner, E. Barnat, P. Miller, A. Paterson, J. Holland, T. Lill
Preview Abstract |
Wednesday, October 19, 2005
2:15PM - 2:30PM
|
|
RW1.00004: $E$ to $H$ transition in very high frequency capacitive discharges.
Pierre Levif, Pascal Chabert, Jean-Luc Raimbault, Jean-Marcel Rax, Michael A. Lieberman
Preview Abstract |
Wednesday, October 19, 2005
2:30PM - 3:00PM
|
|
RW1.00005: PIC and fluid simulations of capacitively coupled plasmas for dielectric etchers and microplasmas
Invited Speaker:
Preview Abstract |
Wednesday, October 19, 2005
3:00PM - 3:30PM
|
|
RW1.00006: Analysis of Triple-Frequency Capacitive Systems for Plasma Processing
Invited Speaker:
Preview Abstract |
Session RW2: Biological Applications of Plasmas
Chair: Uwe Kortshagen, University of Minnesota
Room: Doubletree Hotel Cedar
Wednesday, October 19, 2005
1:30PM - 2:00PM
|
|
RW2.00001: Biological Application of Plasma: Sterilization, Surface Treatment, and Tissue Engineering
Invited Speaker:
Preview Abstract |
Wednesday, October 19, 2005
2:00PM - 2:30PM
|
|
RW2.00002: Electron attachment to molecules of biological relevance
Invited Speaker:
Preview Abstract |
Wednesday, October 19, 2005
2:30PM - 2:45PM
|
|
RW2.00003: Spatial and Temporal Behavior of Repetitive Plasma Discharges in Saline Solutions
Kenneth Stalder, Gagik Nersisyan, William Graham
Preview Abstract |
Wednesday, October 19, 2005
2:45PM - 3:00PM
|
|
RW2.00004: Electron-impact total ionization cross sections of DNA sugar-phosphate backbone and an additivity principle
Winifred Huo, Christopher Dateo
Preview Abstract |
