2005 58th Gaseous Electronics Conference
Sunday–Thursday, October 16–20, 2005;
San Jose, California
Session Index
Session MT1: Material Processing
Chair: Helen Hwang, NASA, Ames, CA
Room: Doubletree Hotel Pine
Tuesday, October 18, 2005
4:00PM - 4:15PM
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MT1.00001: Diagnostics of a Supersonic Plasma Jet Reactor with Secondary Discharge
Jami McLaren, Lenka Zajickova, Joachim Heberlein
Preview Abstract |
Tuesday, October 18, 2005
4:15PM - 4:30PM
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MT1.00002: High Frequency ICP Source for HDPCVD
Jeunghoon Han, Daebong Kang, Jinhyuk Yoo
Preview Abstract |
Tuesday, October 18, 2005
4:30PM - 4:45PM
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MT1.00003: Investigation of charge-up and ion reflection effects in SiO$_2$ etching using a three-dimensional charge-up simulation
Sung Jin Kim, Hae June Lee, Jae Koo Lee
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Tuesday, October 18, 2005
4:45PM - 5:00PM
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MT1.00004: Effect of Species Density and Ion Scattering During Ashing on Ultra Low-$\kappa $ Inter-Level Dielectric Films
M.A. Worsley, S. Bent, N.C.M. Fuller, T.L. Tai, J. Doyle, M. Rothwell, T.J. Dalton
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Tuesday, October 18, 2005
5:00PM - 5:15PM
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MT1.00005: Etching with Electron Beam-Generated Ion-Ion Plasmas
S.G. Walton, D. Leonhardt, M. Lampe, R.F. Fernsler
Preview Abstract |
Session MT2: Glows I
Chair: T. Gans, Ruhr University - Bochum
Room: Doubletree Hotel Cedar
Tuesday, October 18, 2005
4:00PM - 4:15PM
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MT2.00001: Thomson scattering and simulation study of electron energy distribution near the dielectric plate of a planar surface wave plasma source
A. Kono, T. Otsuki, R. Lee, J. Kobayashi, M. Aramaki
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Tuesday, October 18, 2005
4:15PM - 4:30PM
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MT2.00002: Time-Resolved Studies of Pulsed Plasmas
Jose Lopez, WeiDong Zhu, Biswa N. Ganguly, Peter Bletzinger, James M. Williamson, Abraham Belkind, Kurt H. Becker
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Tuesday, October 18, 2005
4:30PM - 4:45PM
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MT2.00003: Shockwave interactions with ionization waves in argon glow discharges
Nicholas Siefert, Biswa Ganguly
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Tuesday, October 18, 2005
4:45PM - 5:00PM
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MT2.00004: Spectrometric analysis and kinetic modelling of an O$_2$-N$_2$ discharge
Chanel Hayden, Derek Monahan, Miles M. Turner, Andrey Islyaikin, Albert R. Ellingboe
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Tuesday, October 18, 2005
5:00PM - 5:15PM
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MT2.00005: Balmer series emission in the afterglow of high-pressure, laser-induced hydrogen and hydrogen-argon plasmas
Lutz H\"{u}wel, Tom Morgan, Bill Graham
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Tuesday, October 18, 2005
5:15PM - 5:30PM
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MT2.00006: Enhanced Plasma Transport due to Neutral Depletion
Amnon Fruchtman, Gennady Makrinich, Pascal Chabert, Jean-Marcel Rax
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