Bulletin of the American Physical Society

2005 58th Gaseous Electronics Conference

Sunday–Thursday, October 16–20, 2005; San Jose, California

Session Index

Session FM: Poster Session I

Chair: I. Langmuir
Room: Doubletree Hotel Fir/Oak

		FM.00001: MATERIAL PROCESSING Preview Abstract
		FM.00002: Low Pressure PECVD of SiO$_{x}$N$_{y}$ Thin Films with Electron-Beam Generated Plasmas Darrin Leonhardt, Scott Walton Preview Abstract
		FM.00003: Niobium surface modification in a microwave discharge Marija Raskovic, Svetozar Popovic, Leposava Vuskovic Preview Abstract
		FM.00004: Anisotropic fluorocarbon plasma etching of Si/SiGe heterostructures Ruhang Ding, Amy Wendt, Levente Klein, Mark Eriksson Preview Abstract
		FM.00005: Industrial Carbon-Doped SiO$_2$ (CDO) Film Etching in Ar/O$_2$/c-C$_4$F$_8$ High Density Plasmas A. Islyaikin, V. Krastev, I. Reid, G. Hughes, A.R. Ellingboe Preview Abstract
		FM.00006: Three-dimensional etching profile simulation using level set methods Gon Jun Kim, Sung Jin Kim, Branislav Radjenovic, Jae Koo Lee Preview Abstract
		FM.00007: Ti Surface Oxidization by Microwave Discharge Oxygen Plasma and Plasma Parameters Satoru Kakizaka, Takeshi Sakamoto, Haruaki Matsuura, Hiroshi Akatsuka Preview Abstract
		FM.00008: Plasma CVD of a-C:F Films Using C$_8$F$_{18}$ and Characterization of their Properties Yosuke Sakai, Shota Tazawa, Yoshiyuki Suda, Hirotake Sugawara Preview Abstract
		FM.00009: Noninvasive Measurement of Ion Energy Distributions in a Plasma Etching System SeJin Oh, ChinWook Chung, SungHo Cha, GiChung Kwon Preview Abstract
		FM.00010: Laser Ablation Plasma Deposition and Ion Implantation of Hafnium and Hafnium-Oxide Thin Films* Nicholas M. Jordan, Ron Gilgenbach, Michael Jones, Lumin Wang, Sha Zhu, Michael Atzmon, Dongchan Jang, Y.Y. Lau Preview Abstract
		FM.00011: MAGNETICALLY ENHANCED PLASMAS Preview Abstract
		FM.00012: Resolving the Plasma Sheath Layer in Two--Dimensional Magnetized Discharges Mark Carter, Philip Ryan, Daniel Hoffman Preview Abstract
		FM.00013: Biased substrate effects on ion characteristics in magnetized inductively coupled plasma Sanghyun Jun, Hong Young Chang Preview Abstract
		FM.00014: Time-Resolved Optical Emission Studies of Pulsed DC Magnetron Plasmas Jose Lopez, WeiDong Zhu, Abraham Belkind, Kurt H. Becker Preview Abstract
		FM.00015: INDUCTIVELY COUPLED PLASMAS Preview Abstract
		FM.00016: Model and Measurements for Closed Loop Control of an Inductively Coupled Plasma Source Bernard Keville, Petar Iordanov, Declan Doherty, Michael B. Hopkins, Ronan Faulkner Preview Abstract
		FM.00017: Investigation of inductively coupled CF$_4$/O$_2$ discharges by Langmuir probe method and optical emission spectroscopy Takashi Kimura, Masahisa Noto Preview Abstract
		FM.00018: Improvement in Uniformity of Linear Inductively Coupled Plasma for Large Area Processing S.M. Choi, S.H. Lee, J.K. Lee, K.N. Kim, G.Y. Yeom Preview Abstract
		FM.00019: Chlorine atom measurements in Ar:Cl$_{2}$ discharges. F.G. Marro, W.G. Graham Preview Abstract
		FM.00020: Study of non-local electron kinetics in a low-pressure afterglow argon plasma Sergey Gorchakov, Florian Sigeneger, Dirk Uhrlandt Preview Abstract
		FM.00021: Optical emission and self mode transition of low frequency inductively coupled plasmas driven by crossed internal oscillating currents YuPing Ren, Pavlo Rutkevych, JiDong Long, QiJin Cheng, ShuYan Xu, Kostya Ostrikov Preview Abstract
		FM.00022: Neutral gas collisional heating and the 0D/1D modeling in a semiconductor plasma reactor Masashi Shimada, George R. Tynan Preview Abstract
		FM.00023: PLASMA BOUNDARIES Preview Abstract
		FM.00024: Consistent matching of plasma and sheath Karl-Ulrich Riemann Preview Abstract
		FM.00025: A bounded active magnetized plasma over a wide range of collisionality Raoul Franklin Preview Abstract
		FM.00026: Investigation of a Planar Langmuir Probe Orientated Parallel to the direct of Flow in a Laser Ablation Plasma Peter Sheerin, Miles M. Turner, Brendan Doggett, James G. Lunney Preview Abstract
		FM.00027: Energy Distributions of Ion Drift to the Cathode in a DC Microdischarge Tsuyohito Ito, Mark Cappelli Preview Abstract
		FM.00028: Different modes of arc attachment at HID cathodes: Simulation and comparison to measurements Oliver Langenscheidt, Lars Dabringhausen, Stefan Lichtenberg, Juergen Mentel, Peter Awakowicz Preview Abstract
		FM.00029: Studies of sheath physics in two ion species plasmas with diode laser LIF Greg Severn, Noah Hershkowitz, M.M. Turner Preview Abstract
		FM.00030: Effect of bombarding ion energy distribution on ion/surface interaction during fluorocarbon plasma etching Amy Wendt, Shuntel Williams, Yuk-Hong Ting, Satoshi Hamaguchi Preview Abstract
		FM.00031: Photoresist covered wafer charging effects in pulsed plasma assisted ion implantation Ji Hyun Hur, Gyung Soo Keum, Jae Hyung Won, Jae Joon Oh, Jai Kwang Shin Preview Abstract
		FM.00032: GLOWS I Preview Abstract
		FM.00033: A multi-beam model for low-current, very high E/N discharges in hydrogen. A.V. Phelps Preview Abstract
		FM.00034: NO kinetics in pulsed DC low-pressure discharge: influence of TiO$_{2}$ surface Lina Gatilova, Olivier Guaitella, Antoine Rousseau, Yury Ionikh, Stefan Welzel, Jurgen Roepcke Preview Abstract
		FM.00035: Benchmark simulations of electronegative discharges Derek Monahan, Miles M. Turner Preview Abstract
		FM.00036: Critical Evaluation of the Global Model Approximation Derek Monahan, Miles M. Turner Preview Abstract
		FM.00037: Characterization of pulsed discharges for next-generation plasma processes Sang-Hun Seo, Shin-Jae You, Dong-Seok Lee, Sang-Won Lee, Hong-Young Chang Preview Abstract
		FM.00038: Observations of Ionization Waves in Argon Glow Discharges using a Microwave Hairpin Resonator Nicholas Siefert, Biswa Ganguly Preview Abstract
		FM.00039: ELECTRON AND POSITRON COLLISIONS WITH ATOMS AND MOLECULES Preview Abstract
		FM.00040: Benchmark calculations for electron collisions with FeII Oleg Zatsarinny, Klaus Bartschat Preview Abstract
		FM.00041: Ground and Excited State Cross Sections for Electron Impact on Cesium William McConkey, Michal Lukomski, TImothy Reddish, Sean Sutton, Wladek Kedzierski Preview Abstract
		FM.00042: Optical potential calculation of elastic electron scattering from heavy noble gases Allan Stauffer, Robert McEachran Preview Abstract
		FM.00043: A New, High-Resolution Positron Beamline James Sullivan, Violaine Vizcaino, Jens Huft, Gerard Atkinson, Adric Jones, Stephen Buckman Preview Abstract
		FM.00044: Elastic and Vibrational Cross Sections in Methane and Cyclopropane Michael Allan Preview Abstract
		FM.00045: Measurement of the Elastic and Vibrational Cross Sections in N$_2$ Over a Wide Angular Range Michael Allan Preview Abstract
		FM.00046: Rydberg-Like Feshbach Resonances in Dissociative Electron Attachment to Amines and Alcohols Michael Allan, Bogdan Ibanescu, Svetlana Zivanov, Olivier May, Patric Oulevey Preview Abstract
		FM.00047: A method for measuring optical cross sections for electron impact excitation from metastable states C.A. DeJoseph, Jr., V.I. Demidov Preview Abstract
		FM.00048: A global (volume averaged) model of a nitrogen discharge Jon T. Gudmundsson, Narfi T. Snorrason, Sungjin Kim, Michael A. Lieberman Preview Abstract
		FM.00049: Electron excitation coefficients in oxygen \v{Z}eljka Nikitovi\'c, Vladimir \v{S}amara, Gordana Malovi\'c, Zoran Petrovi\'c Preview Abstract
		FM.00050: HIGH PRESSURE PLASMA PHYSICS AND CHEMISTRY Preview Abstract
		FM.00051: Experimental study on atmospheric pressure RF capacitive He/O$_2$ discharges Takashi Kimura, Yosuke Hattori, Takamasa Hanai Preview Abstract
		FM.00052: Gas Temperature and Metastable Density Measurements in Ar/H$_{2 }$DBD Using Diode-Laser Absorption Spectroscopy Robert Leiweke, Biswa Ganguly Preview Abstract
		FM.00053: Two-dimensional numerical study of atmospheric pressure glows in helium Peng Zhang, Uwe Kortshagen Preview Abstract
		FM.00054: On the mechanism of hollow-needle to plate atmospheric-pressure DC discharge Milan Simek, Stanislav Pekarek Preview Abstract
		FM.00055: Experimental and computational study of gas temperature characteristics for atmospheric-pressure microgap discharge Akihiro Kono, Tomoyuki Shibata, Mitsutoshi Aramaki Preview Abstract
		FM.00056: Time-Resolved Studies of Fast-Pulsed Dielectric Barrier Discharges Jose Lopez, Robert J. Leiweke, Peter Bletzinger, James M. Williamson, Abraham Belkind, Kurt H. Becker, Biswa N. Ganguly Preview Abstract
		FM.00057: Electrical properties of TiO$_{2}$ in a dielectric barrier discharge Olivier Guaitella, Antoine Rousseau Preview Abstract
		FM.00058: Microdischarge-assisted ignition of large volume dielectric barrier atmospheric pressure glow (DB-APG) discharge Jichul Shin, Laxminarayan Raja Preview Abstract
		FM.00059: Secondary ionization coefficient and electron reflection coefficient of MgO electrode Susumu Suzuki, Haruo Itoh Preview Abstract
		FM.00060: Observation of N$_{4}^{+}$ recombination at near atmospheric pressure S.F. Adams, C.A. DeJoseph, Jr., J.M. Williamson Preview Abstract
		FM.00061: Control of ionic species composition in complex plasmas dominated by charge exchange collisions Kostya Ostrikov Preview Abstract
		FM.00062: Kinetic Modeling of Electric Discharge in a Preformed Air-Plasma Channel Tzvetelina Petrova, Harold Ladouceur, Andrew Baronavski Preview Abstract
		FM.00063: LIGHTNING PLASMAS Preview Abstract
		FM.00064: Basic Study of Discharge Simulation with Relaxation Process of Electron Swarm for Plasma Display Panel Yukio Murakami, Keiichi Kondo Preview Abstract
		FM.00065: Near IR Continuum Radiation From Metal Halide HID Lamps J.E. Lawler, M.T. Herd Preview Abstract
		FM.00066: Development of a compact arc discharge light source for measurement of radicals Haruhiko Ito, Seigo Takashima, Hiroyuki Kano, Masaru Hori Preview Abstract
		FM.00067: COMPUTATIONAL METHODS FOR PLASMAS Preview Abstract
		FM.00068: Convergence of particle-in-cell simulations Miles M. Turner Preview Abstract
		FM.00069: Spectroscopic characterization of an ultrashort laser driven Ar cluster target incorporating both Boltzmann and particle-in-cell models Manolo Sherrill, J. Abdallah, G. Csanak, E. Dodd, Y. Fukuda, Y. Faenov Preview Abstract
		FM.00070: PLASMA AND NANOSTRUCTURAL MATERIALS Preview Abstract
		FM.00071: Nanofabrication of single-crystalline flat panel display microemitter arrays: a ``plasma-building unit'' approach Ken Ostrikov, Shuyan Xu Preview Abstract
		FM.00072: Simulation of ion deposition in nanofabrication of single-crystalline carbon nanotip electron field emitters Igor Levchenko, Ken Ostrikov Preview Abstract

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Bulletin of the American Physical Society

2005 58th Gaseous Electronics Conference

Sunday–Thursday, October 16–20, 2005; San Jose, California

Session Index

Session FM: Poster Session I

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