2005 58th Gaseous Electronics Conference
Sunday–Thursday, October 16–20, 2005;
San Jose, California
Session Index
Session QW2: Inductively Coupled Plasmas
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Chair: T. Makabe, Keiou University
Room: Doubletree Hotel Cedar
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Wednesday, October 19, 2005
10:00AM - 10:15AM
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QW2.00001: 2D Fluid Simulation of VHF{\_}ICP Source with Parallel Resonance Antenna for Next Generation Etch Processing
Sung Hee Lee, Jae Koo Lee
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Wednesday, October 19, 2005
10:15AM - 10:30AM
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QW2.00002: Numerical Study of Hysteresis Phenomenon in an Inductively Coupled Plasma in Ar
Toshikazu Sato, Toshiaki Makabe
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Wednesday, October 19, 2005
10:30AM - 10:45AM
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QW2.00003: Investigations on an inductively coupled magnetic neutral loop discharge
Deborah O'Connell, Dragos Crintea, Martin Brennscheidt, Timo Gans, Uwe Czarnetzki
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Wednesday, October 19, 2005
10:45AM - 11:00AM
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QW2.00004: Electrical and Plasma Parameters of Distributed ICP Driven by Ferromagnetic Core Array
WonKi Lee, ChinWook Chung, V.A. Godyak
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Wednesday, October 19, 2005
11:00AM - 11:15AM
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QW2.00005: Investigations of the E-H transition in an inductively coupled plasma using phase resolved optical emission spectroscopy
Deborah O'Connell, Timo Gans, Uwe Czarnetzki
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Wednesday, October 19, 2005
11:15AM - 11:30AM
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QW2.00006: Comparison of Model and Experiment for Ar/O$_{2}$ Inductively Coupled Plasmas
C.C. Hsu, M.A. Nierode, J.W. Coburn, D.B. Graves
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Wednesday, October 19, 2005
11:30AM - 11:45AM
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QW2.00007: Plasma Characteristics of Industrial Transformer Coupled Plasma
L. Oksuz, A.R. Ellingboe
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Wednesday, October 19, 2005
11:45AM - 12:00PM
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QW2.00008: Comparison of ICP with and without ferromagnetic core
Valery Godyak, Benjamen Alexandrovich
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