2005 58th Gaseous Electronics Conference
Sunday–Thursday, October 16–20, 2005;
San Jose, California
Session Index
Session EM1: Electronegative Plasmas
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Chair: Miles Turner, Dublin City University
Room: Doubletree Hotel Pine
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Monday, October 17, 2005
4:00PM - 4:15PM
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EM1.00001: Charged species' densities and fluxes in a dual-frequency capacitive plasma
Garrett Curley, Jean-Paul Booth, Cormac Corr, Jean Guillon, Sebastien Dine
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Monday, October 17, 2005
4:15PM - 4:30PM
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EM1.00002: Ion Transport in Ion-Ion Plasmas
M. Lampe, R.F. Fernsler, S.P. Slinker, S.G. Walton, D. Leonhardt, G. Joyce
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Monday, October 17, 2005
4:30PM - 4:45PM
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EM1.00003: Electron and Ion Processes in Weak Plasmas
Thomas M. Miller, Jane M. Van Doren, A.A. Viggiano
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Monday, October 17, 2005
4:45PM - 5:00PM
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EM1.00004: Shading effect of electrons and positive ions in charging free plasma etching; In-situ measurement of temporal change of a contact hole charging in a pulsed two frequency CCP.
Takeshi Ohmori, Takumi Akaike, Takeshi K. Goto, Takeshi Kitajima, Toshiaki Makabe
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Monday, October 17, 2005
5:00PM - 5:30PM
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EM1.00005: Double Layers in the expanding region of electronegative plasmas
Invited Speaker:
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