Bulletin of the American Physical Society
64th Annual Meeting of the APS Division of Plasma Physics
Volume 67, Number 15
Monday–Friday, October 17–21, 2022; Spokane, Washington
Session UO08: Plasma-Surface Interactions, Interfacial Plasmas, Emerging Applications
2:00 PM–4:36 PM,
Thursday, October 20, 2022
Room: 402 ABC
Chair: Elijah Thimsen, Washington Univ. St Louis
Abstract: UO08.00005 : Research and Development of Microwave Plasma Enhanced Chemical Vapor Deposition System Using the Fluid Modeling based on the Finite Element Method*
2:48 PM–3:00 PM
Presenter:
Kaviya Aranganadin
(Hanyang university)
Authors:
Kaviya Aranganadin
(Hanyang university)
Yilang Jiang
(Hanyang University)
Jing-Shyang Yen
(Department of Electronic Engineering, National Taipei University of Technology, Taipei 10608, Taiwan)
Jwo-Shiun Sun
(Department of Electronic Engineering, National Taipei University of Technology, Taipei 10608, Taiwan)
Hua-Yi Hsu
(National Taipei University of Technology)
Ming-Chieh Lin
(Hanyang University)
*This work was partially supported by the BK21 FOUR (Fostering Outstanding Universitiesfor Research) program through the National Research Foundation (NRF) funded by the Ministry of Education of Korea, the X-mind Crops program of NRF, ICT (NRF-2017H1D8A1032167), Hanyang University (HY-201400000002393) in Korea, and Mastek Technologies, Inc. in Taiwan.
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