Bulletin of the American Physical Society
64th Annual Meeting of the APS Division of Plasma Physics
Volume 67, Number 15
Monday–Friday, October 17–21, 2022; Spokane, Washington
Session GP11: Poster Session III: In-Person, Hall A (9:30-11:00am) and Virtual Poster Presentations (11:15am-12:30pm)
MFE: DIII-D
Low Temperature Plasma
FUND: Dusty Plasmas; Plasma Sources
9:30 AM - 12:30 PM
Tuesday, October 18, 2022
Room: Exhibit Hall A and Online
Abstract: GP11.00089 : Sputtering Reduction Optimization via Volumetrically Complex Materials*
Presenter:
Graeme T Sabiston
(UCLA)
Authors:
Graeme T Sabiston
(UCLA)
Richard E Wirz
(UCLA)
Collaboration:
AMPERE
In this work, high-fidelity ion-solid interaction simulation data were gathered from an experimentally validated ion-solid interaction code, TRI3DYN, and merged with an analytical sputtering model for volumetrically complex materials. Probability density functions (PDFs) of sputterant trajectory are determined for individual VCM ligaments, revealing the driving forces behind sputterant transport in micro-architectured materials. PDFs of a foam ligament with a circular cross section were calculated and found to vary in shape and backsputter fraction based on ion energy. These PDFs suggest that at energies up to 1 keV the high concentration of sputterant trajectories in off normal directions are favorable for trapping sputtered particles, as these regions of the PDF are readily captured by adjacent ligaments. The individual contributions of sputter yield from the ligament layers that comprise the VCM showed that the top layer in responsible for the majority of the back sputtered atoms, with subsequent layers contributing exponentially less.
Non-linear constrained optimization provides optimal designs of VCM geometry that reduce sputter yield on the order of 40%, subject to constraining the amount of forward-sputtered material passing through the VCM.
*This work was supported by Ultramet, Inc., DOE Award DE-AR0001378 "AMPERE", and the University of California, Los Angeles department of Mechanical and Aerospace engineering
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