Bulletin of the American Physical Society
53rd Annual Meeting of the APS Division of Plasma Physics
Volume 56, Number 16
Monday–Friday, November 14–18, 2011; Salt Lake City, Utah
Session GI2: DPP/GEC Joint Session: Low Temperature Plasmas I
9:30 AM–12:30 PM,
Tuesday, November 15, 2011
Room: Ballroom BD
Chair: Amy Wendt, University of Wisconsin
Abstract ID: BAPS.2011.DPP.GI2.1
Abstract: GI2.00001 : Damage-free Neutral Beam Etching, Deposition and Surface Modification Processes for Novel Nano-scale Devices
9:30 AM–10:00 AM
Preview Abstract
Abstract
Author:
Seiji Samukawa
(Institute of Fluid Science, Tohoku University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.DPP.GI2.1
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