Multi-color, Multi-path Optical Beam Steering Utilizing High Performance MEMS Mirrors*

Scaling current atomic based quantum computer experiments beyond individual gate operations requires an efficient means of distributing laser resources across an array of trap sites. Micro-electromechanical system (MEMS) technology can provide the scalability and flexibility in an optical beam steering system to effectively share multiple, independent lasers among trap sites within a $1$D or $2$D qubit array. Controllable micro mirrors with broadband reflective metal coatings enable concurrent multi-wavelength beam steering along multiple beam paths as well as wavelength multiplexing along the same beam path. We demonstrate a MEMS based beam steering system that addresses $49$ locations in a $7$x$7$ array with two separate wavelengths at $635$ nm and $780$ nm. This system features switching speeds between lattice sites of $4$ $\mu$s and $-29$ dB residual optical intensity at neighboring array locations.