Bulletin of the American Physical Society
2005 36th Meeting of the Division of Atomic, Molecular and Optical Physics
Tuesday–Saturday, May 17–21, 2005; Lincoln, Nebraska
Session G2: Electron Driven Processes and Their Applications
1:30 PM–3:54 PM,
Thursday, May 19, 2005
Burnham Yates Conference Center
Room: Ballroom II
Co-Sponsoring
Unit:
GEC
Chair: Thomas N. Rescigno, Lawrence Berkeley National Laboratory
Abstract ID: BAPS.2005.DAMOP.G2.1
Abstract: G2.00001 : Fundamental Data for Semiconductor Manufacturing Unit Process Modeling and Simulation: Generation, Application and Current Needs
1:30 PM–2:06 PM
Preview Abstract
Abstract
Author:
Peter Ventzek
(Freescale Semiconductor Inc.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2005.DAMOP.G2.1
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