Resistivity of the Alumina Diffusion Barrier in Catalytic Carbon Nanotube Growth*

By using photolithography techniques and catalytically grown carbon nanotubes (CNTs) it is possible to fabricate high aspect ratio structures that can be used as scaffolds for MEMS devices. One drawback of making CNT structures this way is it is difficult to electrically connect to them since they are grown on an insulating alumina layer. However, previous work demonstrates that the alumina layer becomes conductive during CNT growth. Two-point probe measurements from tungsten to a CNT post in a 100 nm tungsten/50 nm alumina/CNT stack yielded 580 ± 65 Ω. I present TEM based data showing how this change in conductivity correlates with iron and carbon diffusing into the alumina layer during CNT growth. I will also show how the change in resistivity compares to what is expected in doped alumina.