Bulletin of the American Physical Society
2009 Joint Spring Meeting of the Ohio Sections of the APS and AAPT
Volume 54, Number 3
Friday–Saturday, April 24–25, 2009; Ada, Ohio
Session D1: Plenary Session III |
Hide Abstracts |
Room: McIntosh Center Ballroom |
Saturday, April 25, 2009 10:00AM - 11:00AM |
D1.00001: Plasma-surface interactions Invited Speaker: Materials processing is at a crossroads. Currently much of industrially viable materials processing is via plasmas. However as this processing has reached the nano-scale, development of industrially viable processes has become more and more difficult. In part this is because of all of the free parameters that exist in plasmas. To overcome this economic issue, tool vendors and semiconductor companies have turned to complex computational models of processing plasmas. For those models to work, one requires a through understanding of all of the gas-phase and surface-phase processes that are exhibited in plasmas. Unfortunately, these processes are not well understood. In this paper we will examine a new model of plasma-surface processes. Specifically we will examine how the plasma-surface interactions set how process tools work. From this we will examine the potential future of the plasma-processing field. [Preview Abstract] |
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700