Bulletin of the American Physical Society
2023 APS March Meeting
Volume 68, Number 3
Las Vegas, Nevada (March 5-10)
Virtual (March 20-22); Time Zone: Pacific Time
Session W74: Semiconducting Qubits IV
3:00 PM–6:00 PM,
Thursday, March 9, 2023
Room: Room 403/404
Sponsoring
Unit:
DQI
Chair: Andrey Kiselev, HRL Laboratories, LLC
Abstract: W74.00007 : Characterization of ultra-low charge noise Silicon MOS quantum dots fabricated in a full 300mm CMOS platform*
4:36 PM–4:48 PM
Presenter:
Asser Elsayed
(KU Leuven)
Authors:
Asser Elsayed
(KU Leuven)
Mohamed Shehata
(KU Leuven, imec)
Clement Godfrin
(imec)
Ruoyu Li
(imec)
Stefan Kubicek
(imec)
Shana Massar
(imec)
Yann Canvel
(imec)
Arame Thiam
(imec)
Julien Jussot
(imec)
Massimo Mongillo
(imec)
Danny Wan
(imec)
Pol Van Dorpe
(imec)
Kristiaan De Greve
(imec)
By leveraging these processes, we have developed an optimized MOS gate stack specifically for spin qubit applications. We have characterized the MOS gate stack with gated hall-bars and used the optimized flow to fabricate quantum dot devices. We report highly uniform quantum dot operation and ultra-low noise at the SiSiO2 interface at milli-Kelvin temperatures. These results confirm the excellent control over interface quality and set the basis for the large integration of quantum dot devices with low variability across the silicon wafer.
[1] X. Xue et al. Nature (2022)
[2] A. Noiri et al. Nature (2022)
[3] A. M. J. Zwerver et al. Nature Electronics (2022)
[4] R. Li et al. IEDM (2020)
*This work is supported, in part, by the imec Industrial Affiliation Program on Quantum Computing. We acknowledge support from the European Union's Horizon 2020 research and innovation programme QLSI project under grant agreement No 951852.
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