Bulletin of the American Physical Society
2023 APS March Meeting
Volume 68, Number 3
Las Vegas, Nevada (March 5-10)
Virtual (March 20-22); Time Zone: Pacific Time
Session N42: 2D Materials: Advanced Characterization III
11:30 AM–2:18 PM,
Wednesday, March 8, 2023
Room: Room 318
Sponsoring
Unit:
DMP
Chair: Sujitra Pookpanratana, National Institute of Standards and Tech
Abstract: N42.00002 : An Operando Spectroscopic Imaging Ellipsometry Study of HfS2 Oxidation
12:06 PM–12:18 PM
Presenter:
Irina Chirca
(University of Cambridge)
Authors:
Irina Chirca
(University of Cambridge)
AbdulAziz AlMutairi
(University of Cambridge)
Stephan Hofmann
(Univ of Cambridge)
In this study, we investigate the oxidation of few-layer HfS2 by spectroscopic imaging ellipsometry (SIE) - a fast, non-destructive, large-area characterisation tool for mapping and analysis of multi-layer heterostructures. Given the 1um lateral resolution and atomic layer precision, we can resolve three-dimensional images of the oxidation process and the formation of a HfS2/HfO2 interface in operando. Through optical modelling, we quantify the oxide thickness, uniformity and quality for different oxidation methods. This leads to a finer control of the oxidation process, while the rapid, high-throughput wafer-scale acquisition capabilities of SIE allow for statically relevant data sets and open up data-driven approaches.
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