Bulletin of the American Physical Society
2023 APS March Meeting
Volume 68, Number 3
Las Vegas, Nevada (March 5-10)
Virtual (March 20-22); Time Zone: Pacific Time
Session K41: Ferroics in Two Dimensional Materials, Films, and Heterostructures
3:00 PM–5:36 PM,
Tuesday, March 7, 2023
Room: Room 319
Sponsoring
Unit:
DMP
Chair: Lingfang Lin, University of Tennessee
Abstract: K41.00002 : Operando hard X-ray photoemission characterization of oxygen vacancies and correlation with the performance of ferroelectric, hafnia-based, non-volatile memories*
3:36 PM–3:48 PM
Presenter:
Nicholas Barrett
(SPEC, CNRS, CEA Université Paris Saclay)
Authors:
Nicholas Barrett
(SPEC, CNRS, CEA Université Paris Saclay)
Wassim Hamouda
(HZB Berlin)
Christophe Lubin
(SPEC, CNRS, CEA, Université Paris Saclay)
Furqan Mehmood
(GlobalFoundries)
Uwe Schroeder
(NaMLab gGmbH)
Thomas Mikolajick
(NaMLab gGmbH)
Olivier Renault
(University Grenoble Alpes, CEA, LETI)
Shinegori Ueda
(NIMS/SPring-8)
Yoshiyuki Yamashita
(NIMS/SPring-8)
Collaboration:
CEA/SPEC, NaMLab, NIMS/SPring-8
Oxygen vacancy control is a potentially fruitful path towards reliability of industrial standards since they play a key role in material properties and device performance. However, a major challenge is the direct measurement of the oxygen vacancy concentration with both lateral and depth resolution on the scale of the devices
Operando X-ray Photoelectron spectroscopy (XPS) and Hard X-ray photoemission (HAXPES) are highly sensitive tools for measuring oxygen scavenging and the consequential reduction of Hf cations. The tunable depth sensitivity provides a handle to measure the concentration profile rather than just an average measurement over the film thickness.
We have used synchrotron radiation based operando HAXPES on microscopic capacitors to quantify the oxygen vacancy concentration profile near the top TiN/HfZrO2 interface due to oxygen scavenging as a function of field cycling from the pristine state through the wake-up regime to finally device fatigue and correlate it with the electrical performances.
*This project received funding from the European Union's Horizon 2020 research and innovation programme under Grant Agreement No. 780302 3eFERRO.
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