Bulletin of the American Physical Society
APS March Meeting 2019
Volume 64, Number 2
Monday–Friday, March 4–8, 2019; Boston, Massachusetts
Session X57: Mechanical Metamaterials II
8:00 AM–10:48 AM,
Friday, March 8, 2019
BCEC
Room: 256
Sponsoring
Unit:
GSNP
Chair: Johannes Overvelde, AMOLF
Abstract: X57.00014 : Atomic layer deposition for membranes, metamaterials, and machines*
10:36 AM–10:48 AM
Presenter:
Kyle J Dorsey
(School of Applied and Engineering Physics, Cornell University)
Authors:
Kyle J Dorsey
(School of Applied and Engineering Physics, Cornell University)
Tanner G Pearson
(School of Applied and Engineering Physics, Cornell University)
Edward P Esposito
(Laboratory of Atomic and Solid State Physics, Cornell University)
Baris Bircan
(School of Applied and Engineering Physics, Cornell University)
Yimo Han
(School of Applied and Engineering Physics, Cornell University)
Sierra Russell
(Nanoscale Engineering, SUNY Polytechnic)
David Anthony Muller
(School of Applied and Engineering Physics, Cornell University)
Itai Cohen
(Laboratory of Atomic and Solid State Physics, Cornell University)
Paul L McEuen
(Laboratory of Atomic and Solid State Physics, Cornell University)
*This work was supported by NSF DMREF DMR-1435829, AFOSR MURI FA2386-13-1-4118, and NSF MRI DMR-1429155. This work was performed in part at the CNF supported by NSF Grant ECCS-1542081 and the CCMR supported by NSF MRSEC DMR-1719875.
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