Bulletin of the American Physical Society
APS March Meeting 2018
Volume 63, Number 1
Monday–Friday, March 5–9, 2018; Los Angeles, California
Session T60: Poster Session III
1:00 PM,
Thursday, March 8, 2018
LACC
Room: West Hall A
Abstract ID: BAPS.2018.MAR.T60.300
Abstract: T60.00300 : Nanofabrication of GLAD Structures – A Comparison of Ion and Electron Beam Deposition Techniques
Presenter:
Judy Tran
(Department of Physics, Cal State Univ- San Bernardino)
Authors:
Judy Tran
(Department of Physics, Cal State Univ- San Bernardino)
Rene Feder
(Department of Electrical Engineering, University of Nebraska-Lincoln)
Matthew Hilfiker
(Department of Electrical Engineering, University of Nebraska-Lincoln)
Eva Schubert
(Department of Electrical Engineering, University of Nebraska-Lincoln)
In conclusion, EBE provides a higher deposition rate than IBS, but the films show a higher porosity and the columnar structures tend to have a more pronounced fanning, limiting the usability and thickness of the film.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.MAR.T60.300
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