Bulletin of the American Physical Society
APS March Meeting 2017
Volume 62, Number 4
Monday–Friday, March 13–17, 2017; New Orleans, Louisiana
Session H28: Semiconductor Processing and Devices for Application
2:30 PM–5:18 PM,
Tuesday, March 14, 2017
Room: 291
Sponsoring
Unit:
FIAP
Chair: Todd Brintlinger, Naval Research Laboratory
Abstract ID: BAPS.2017.MAR.H28.8
Abstract: H28.00008 : Strategies for alignment and e-beam contact to buried atomic-precision devices in Si
3:54 PM–4:06 PM
Preview Abstract Abstract
Authors:
Jonathan Wyrick
(National Institute of Standards and Technology)
Pradeep Namboodiri
(National Institute of Standards and Technology)
Xiqiao Wang
(National Institute of Standards and Technology)
Roy Murray
(National Institute of Standards and Technology)
Joseph Hagmann
(National Institute of Standards and Technology)
Kai Li
(National Institute of Standards and Technology)
Michael Stewart
(National Institute of Standards and Technology)
Curt Richter
(National Institute of Standards and Technology)
Richard Silver
(National Institute of Standards and Technology)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2017.MAR.H28.8
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