Session Q21: THz and Impedance Spectroscopy
11:15 AM–2:15 PM, Wednesday, March 23, 2011
Room: D161
Sponsoring Unit:
GIMS
Chair: Rachael Floyd, Janis Research Company
Abstract ID: BAPS.2011.MAR.Q21.9
Abstract: Q21.00009 : Damping effects of capacitive comb fingers on biomimetic MEMS directional microphone
12:51 PM–1:03 PM
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Abstract 
Authors:
John Roth
(Naval Postgraduate School)
Michael Touse
(Naval Postgraduate School)
Jose Sinibaldi
(Naval Postgraduate School)
Gamani Karunasiri
(Naval Postgraduate School)
MEMS directional sound sensors that use two coupled wings moving in air are subjected to viscous damping. The amplitude of oscillation of the sensors is read out by measuring the capacitance of interdigitated comb fingers along the edges of the wings. In this presentation, effects of damping on MEMS sensors with and without comb fingers will be described. It was found that the sensors with comb fingers have a significantly larger damping indicating that the longer perimeter due to combs is responsible for the observed increase [1]. However, the increase in damping reduces the quality factor which improves the response time of the device. \\[4pt] [1] W. Zhang and K. Turner, \textit{Sensors \& Actuators: A.} \textbf{134} p.594 (2007).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.MAR.Q21.9