Session V30: Nanotechnology Applications: NEMS, CNTs, Graphene, and Nanoscale Devices

8:00 AM–11:00 AM, Thursday, March 18, 2010
Room: D139

Sponsoring Unit: FIAP
Chair: Willi Mickelson, Center for Integrated Nanomechanical Systems, University of California, Berkeley

Abstract ID: BAPS.2010.MAR.V30.1

Abstract: V30.00001 : Ultrathin single crystal diamond nanomechanical resonators

8:00 AM–8:12 AM

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  M.P. Ray
    (Naval Research Laboratory)

  J.W. Baldwin
    (Naval Research Laboratory)

  J.E. Butler
    (Naval Research Laboratory)

  B.B. Pate
    (Naval Research Laboratory)

  T. Feygelson
    (SAIC Inc.)

  M. Zalalutdinov
    (Global Strategies Group Inc.)

We report the fabrication and operation of ultrathin ($<$ 100 nm) high-frequency single crystal diamond nanomechanical resonators. Suspended diamond dome structures were created in a microwave hydrogen plasma which undercuts a sacrificial damage layer formed by medium energy (150-180 keV) ion implantation at a high fluence ($>$1$\times$10$^{16}$ ions/cm$^{2}$ ). Under high vacuum conditions we measure resonant frequencies between 70 MHz and 550 MHz with quality factors ranging from $\sim$ 750 to over 1000 using an optical technique. Mechanical, thermal and optical properties in combination with chemical inertness and bio-compatibility of single crystal diamond make these high-frequency, low-mass dome resonators suitable for sensing applications.

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